Highly (111)-textured diamond film growth with high nucleation density

LOW ENERGY ACCELERATOR, RAY TECHNOLOGY AND APPLICATIONS

Highly (111)-textured diamond film growth with high nucleation density

YANG Shumin，

WAN Dongyun，

HE Zhoutong，

XIA Huihao，

ZHU Dezhang，

GONG Jinlong

Nuclear Science and Techniques

Vol.19, No.3

pp.147-151

Published in print 20 Jun 2008

DOI：10.1016/S1001-8042(08)60041-X

CLC：TN304.1+8,TN304.055,TN305.1

36100

In a traditional hot-filament chemical vapor deposition (HF-CVD) system, highly (111)-textured diamond film was deposited on Si (111) substrate treated by diamond powder ultrasonic scratching or other methods. The relationship between the (111)-textured diamond film growth and the nucleation density has been discussed. The morphologies and structures of the films were characterized by scanning electron microscopy (SEM), X-ray diffraction (XRD) and Raman spectroscopy.

Diamond filmHF-CVDNucleationDefectSilicon carbideNanowire

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