
Phase structure of the CPD prepared CdS films before and after Ar+ ion irradiation
CdS films prepared with chemical pyrolysis deposition (CPD) at different temperature during film growth were characterized by XRD. Hexagon-like struc-ture appeared at the temperature of 350-500℃, while wurtzite phase was observed at temperature of 540℃ during film growth. Also CdS films prepared by CPD at 400℃ were undergone post annealing at different temperature of 200-600℃ or post Ar+ ion irradiation. It is found that wurtzite phase happened when the annealing temperature rose to 600℃. And hexagon-like structure existed at the annealing temperature from 25℃ to near 500℃. Ar+ ion irradiation could not cause phase transformation, but induce some preferred orientations and an increase in grain size for the CdS films.