Plasma properties of pulsed laser ablation of GaAs

Man Bao-Yuan，

Wang Xiang-Tai，

Hu Xie-Rong，

Guo Xiang-Xin，

Miao Yong

Nuclear Science and Techniques

Vol.08, No.2

pp.98-102

Published in print 01 May 1997

20200

Simultaneous time and space-resolved emission spectrum from a Nd: YAG laser-ablated plasma on a GaAs target has quantitative information on the generation and the propagation of species in the plasma at 1 atm or lower pressures. The experimental results show that the characteristics of the species in plasma are strongly influenced by the ambient pressure. The time-of-flight distributions of Ga atoms exhibit twin-peak structure, which can be explained by recombination process. The mean projected ranges of As⁺ ions in the atmosphere of different densities were calculated according to Ziegler' theory model and the slowing down processes of them were simulated by using a Monte Carlo simulation program TRIM90. The calculated results are consistent with the experimental.

Laser plasmaTime-resolved spectroscopyRecombinationProjected range.

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