Nuclear Science and Techniques

A MICROBEAM SYSTEM OF HIGH ENERGY IONS AT FUDAN UNIVERSITY

Ren Chigang，

Zhou Shijun，

Che Jianmei，

Hu Yude，

Chen Jianxin，

Fang Dufei，

Yang Fujia

Nuclear Science and Techniques

Vol.2, No.1

pp.13-18

Published in print 01 Feb 1991

4000

Particle induced X- ray emission (PIXE) and Rutherford backscattering spectrometry (RBS) have been used extensively for analytical purpose because of their quantitative accuracy, reliability, simplicity and capability of non- destructive and multielement analysis. When these techniques are combined with a scanning microbeam system and a data acquisition system, three dimensional distribution of elemental composition can be displayed. Samples analyzed so far at Fudan University include a microelectronic circuit and some biological and archaeological samples. The PIXE and RBS spectra and the secondary electron images have been measured.

Microbeam systemSPMHuman hair specimenExamine a crack in steelElemental maps of copper mirror of Han Dynasty

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