PREFERENTIAL SPUTTERING OF Cu₇₆Ni₁₅Sn₉

PREFERENTIAL SPUTTERING OF Cu 76 Ni 15 Sn 9 1 2 3 first-author 2 3 2 3 4 4 4 5 5 CCAST World Laboratory , P. O. Box 8730, Beijing 100080 CCAST World Laboratory , P. O. Box 8730, Beijing 100080 T. D. Lee Physics Laboratory, Fudan University, Shanghai 200433 T. D. Lee Physics Laboratory, Fudan University, Shanghai 200433 Institute of Nuclear Research, the Chinese Academy of Sciences, Shanghai 201800 Institute of Nuclear Research, the Chinese Academy of Sciences, Shanghai 201800 Shanghai Applied Radiation Institute, Shanghai University, Shanghai 201800 Shanghai Applied Radiation Institute, Shanghai University, Shanghai 201800 Central Laboratory, Hangzhou University, Hangzhou 310028 Central Laboratory, Hangzhou University, Hangzhou 310028 Using collection film technique combined with Auger electron spectroscopy is analysis, the preferential sputtering of the ternary alloy Cu 76 Ni 15 Sn 9 bombarded with 27 keV Ar + at normal incidence is studied. After bombardment, the target surface is examined with SEM, and the surface composition of different topographical feature areas is measured with electron probe micro-analyser (EPMA). The experiment results show that Cu atoms are preferentially ejected compared with Ni atoms, and Sn atoms come third within the ejection angle range from 0° to 60°. The results are discussed from the viewpoint of sputtering from a very rough surface. Auger electron spectroscopy Topography Preferential sputtering Cu 76 Ni 15 Sn 9 REFERENCES Betz G , Arias M , Braun P . Nucl Instr Meth , 1980 ; 170 : 347 Nucl Instr Meth Betz G , Dudonis J , Braun P . Surf Sci , 1981 ; 104 : L185 Surf Sci Mattieu H J , Landolt D . Appl Surf Sci , 1979 ; 3 : 348 Appl Surf Sci Wittmaack K , Blank P . Nucl Instr Meth , 1980 ; 170 : 331 Nucl Instr Meth Wang Zhenxia , Pan Jisheng , Zhang Jiping et al . J Mater Sci Lett , 1992 ; 11 : 719 J Mater Sci Lett Wang Zhenxia , Pan Jisheng , Zhang Jiping et al . Nucl Instr Meth , 1993 ; B74 : 380 Nucl Instr Meth Lewis J E , Ho P S . J Vac Sci Technol , 1979 ; 16 : 772 J Vac Sci Technol Betz G . Surf Sci , 1980 ; 92 : 283 Surf Sci Shimizu R . Nucl Instr Meth , 1987 ; B18 : 486 Nucl Instr Meth Lam N Q . Nucl Instr Meth , 1992 ; B71 : 371 Nucl Instr Meth Matsunami N , Yamamura Y et al . Energy dependence of the yields ion-induced sputtering of monatomic solids, IPPJ-AM-32 . Institute of Plasma Physics, Nagoya University , 1983 Energy dependence of the yields ion-induced sputtering of monatomic solids, IPPJ-AM-32 Kelly R . In: Kelly R , da , eds. Silva M F . Materials modification by high-fluence ion beams . London : Kluwer Academic Publishers , 1989 : 305 Materials modification by high-fluence ion beams Whitton J L , Kiriakidis G , Carter G et al . Nucl Instr Meth , 1984 ; B2 : 640 Nucl Instr Meth Whitton J L , Holck O , Carter G et al . Nucl Instr Meth , 1980 ; 170 : 371 Nucl Instr Meth Tanovic L , Tanovic N . Nucl Instr Meth , 1987 ; B18 : 538 Nucl Instr Meth Roosendaal H E . In: Behrisch I R , ed. Sputtering by particle bombardment . New York : Springer-Verlag , 1981 : 219 Sputtering by particle bombardment *This work was supported by the Shanghai Hefu Photoelectric Instrument Co., LTD. 1994-09-25 1995-02-01 2021-02-05 1995 Nuclear Science and Techniques 1 6