Studies of preparing method of nano grain metal-insulator film Cu:CaF₂

Studies of preparing method of nano grain metal-insulator film Cu:CaF 2 1 first-author 1 1 1 1 Institute of Heavy Ion Physics, Peking University, Beijing 100871 Institute of Heavy Ion Physics, Peking University, Beijing 100871 A machine to prepare nano grain metal-insulator films, for example Cu:CaF 2 film, by means of magnetron sputtering generating clusters and at the same time evaporating insulator medium, is introduced. This machine is suitable for almost all solid metal and semiconductor clusters. And with it, many kinds of function film series can be prepared. The size of cluster embedded in insulator is from 10 to 70 nm. The Cu cluster and medium CaF 2 are both polycrystalline structure. Embedded cluster Crystalline structure Nano grains Film Megnetron sputtering Evaporating References Wang Y , Suna A , Mahler W et al . J Chem Phys , 1987 ; 87 : 7315 J Chem Phys Rubia A , Serra L . Phys Rev , 1993 ; B48 : 222 Phys Rev Chemla D S , Miller D A B . J Opt Soc Am , 1985 ; B2 : 1155 J Opt Soc Am Rnox W H , Hirlimann C , Miller D A B et al . Phys Rev Lett , 1985 ; 54 : 1306 Phys Rev Lett Habberland M , Karrais M . Clusters and cluster-assembled materials . In: Averback Robert S , ed, MRS symposium proceedings , Vol.206 . 1991 ; 291 Clusters and cluster-assembled materials The Project Supported by National Natural Science Foundation of China 1996-04-16 1996-11-01 2021-02-05 1996 Nuclear Science and Techniques 4 7