Influence of N<sub>2</sub> flow rate on structure and properties of TiBCN films prepared by multi-cathodic arc ion plating and studied with ion beam scattering spectroscopy

Bin Han; Ze-Song Wang; D. Neena; Bao-Zhu Lin; Bing YANG; Chuan-Sheng Liu; De-Jun Fu

doi:10.1007/s41365-017-0212-0

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Influence of N₂ flow rate on structure and properties of TiBCN films prepared by multi-cathodic arc ion plating and studied with ion beam scattering spectroscopy

NUCLEAR CHEMISTRY, RADIOCHEMISTRY, NUCLEAR MEDICINE | Updated：2021-02-23

- Influence of N₂ flow rate on structure and properties of TiBCN films prepared by multi-cathodic arc ion plating and studied with ion beam scattering spectroscopy
- Nuclear Science and Techniques Vol. 28, Issue 5, Article number: 59(2017)
- Affiliations：
  
  1.Key Laboratory of Artificial Micro- and Nano-Materials of Ministry of Education and School of Physics and Technology, Wuhan University, Wuhan 430072, China
  2.School of Power and Mechanical Engineering, Wuhan University, Wuhan 430072, China
- Author bio：
  
  Corresponding author. E-mail address: djfu@whu.edu.cn
- Funds：
- DOI：10.1007/s41365-017-0212-0
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Bin Han, Ze-Song Wang, D. Neena, et al. Influence of N₂ flow rate on structure and properties of TiBCN films prepared by multi-cathodic arc ion plating and studied with ion beam scattering spectroscopy. [J]. Nuclear Science and Techniques 28(5):59(2017)
DOI：

Bin Han, Ze-Song Wang, D. Neena, et al. Influence of N₂ flow rate on structure and properties of TiBCN films prepared by multi-cathodic arc ion plating and studied with ion beam scattering spectroscopy. [J]. Nuclear Science and Techniques 28(5):59(2017) DOI： 10.1007/s41365-017-0212-0.

摘要

Abstract

TiBCN films were deposited on Si(100) and cemented carbide substrates by using multi-cathodic arc ion plating in C,2,H,2, and N,2, atmosphere. Their structure and mechanical properties were studied systematically under different N,2, flow rates. The results showed that the TiBCN films were adhered well to the substrates. Rutherford backscattering spectroscopy was employed to determine the relative concentration of Ti, B, C and N in the films. The chemical bonding states of the films were explored by X-ray photoelectron spectroscopy, revealing the presence of bonds of TiN, Ti(C,N), BN, pure B, sp,2, C-C and sp,3, C-C, which changed with the N,2, flow rate. TiBCN films contain nanocrystals of TiN/TiCN and TiB,2,/Ti(B,C) embedded in an amorphous matrix consisting of amorphous BN and carbon at N ,2, flow rate of up to 250 sccm.

关键词

Keywords

TiBCNnanocompositeN2 flow rateRutherford backscattering spectroscopy (RBS)X-ray photoelectron spectroscopy

references

H. Holzschuh, Chemical-vapor deposition of wear resistant hard films in the Ti-B-C-N system: properties and metal-cutting tests. Int. J. Refract. Met. H. 20:143-149 (2002). doi: 10.1016/s0263-4368(02)00013-6http://doi.org/10.1016/s0263-4368(02)00013-6

I. Dreiling, D. Stiens, T. Chassé, Raman spectroscopy investigations of TiBxCyNz films deposited by low pressure chemical vapor deposition. Surf. Coat. Technol. 205: 1339-1344 (2010). doi: 10.1016/j.surfcoat.2010.09.022http://doi.org/10.1016/j.surfcoat.2010.09.022

P.C. Tsai, W.J. Chen, J.H. Chen, et al., Deposition and characterization of TiBCN films by cathodic arc plasma evaporation. Thin Solid Films 517, 5044-5049 (2009). doi: 10.1016/j.tsf.2009.03.029http://doi.org/10.1016/j.tsf.2009.03.029

S. Shimada, M. Takahashi, J. Tsujino, et al., Deposition and wear resistance of Ti-B-N-C films on WC-Co cutting tools from alkoxide solutions by thermal plasma CVD. Surf. Coat. Technol. 201, 7194-7200 (2007). doi: 10.1016/j.surfcoat.2007.01.041http://doi.org/10.1016/j.surfcoat.2007.01.041

J. Lin, B. Mishra, J.J. Moore, et al., Effect of asynchronous pulsing parameters on the structure and properties of CrAlN films deposited by pulsed closed field unbalanced magnetron sputtering (P-CFUBMS). Surf. Coat. Technol. 202, 1418-1436 (2008). doi: 10.1016/j.surfcoat.2007.06.068http://doi.org/10.1016/j.surfcoat.2007.06.068

F. Saugnac, F. Teyssandier, A. Marchand, Characterization of C-B-N Solid Solutions Deposited from a Gaseous Phase between 900"and 1050°C. J. Am. Ceram. Soc. 75, 161-69 (1992). doi: 10.1111/j.1151-2916.1992.tb05459.xhttp://doi.org/10.1111/j.1151-2916.1992.tb05459.x

M.D. Abad, J.C. Sánchez-López, M. Brizuela, et al., Influence of carbon chemical bonding on the tribological behavior of sputtered nanocomposite TiBC/a-C films. Thin Solid Films 518, 5546-5552 (2010). doi: 10.1016/j.tsf.2010.04.038http://doi.org/10.1016/j.tsf.2010.04.038

L.L. Wang, R.Y. Wang, S.J. Yan, et al., Structure and properties of Mo-containing diamond-like carbon films produced by ion source assisted cathodic arc ion-plating. Appl. Surf. Sci. 286, 109-114 (2013). doi: 10.1016/j.apsusc.2013.09.029http://doi.org/10.1016/j.apsusc.2013.09.029

C. Rebholz, A. Leyland, P. Larour, et al., The effect of boron additions on the tribological behaviour of TiN films produced by electron-beam evaporative PVD. Surf. Coat. Technol. 116-119, 648-653 (1999). doi: 10.1016/s0257-8972(99)00260-1http://doi.org/10.1016/s0257-8972(99)00260-1

H. Elmkhah, F. Mahboubi, A. Abdollah-Zadeh, et al., Size-dependency of corrosion behavior for TiN nanostructure films deposited by the PACVD method. Materials Letters 82, 105-108 (2012). doi: 10.1016/j.matlet.2012.04.154http://doi.org/10.1016/j.matlet.2012.04.154

D.E. Wolfe, J. Singh, Synthesis and characterization of TiBCN films deposited by ion beam assisted, co-evaporation electron beam-physical vapor deposition (EB-PVD). J. Mater. Sci. 37, 3777-3787 (2002). doi: 10.1016/s0257-8972(02)00666-7http://doi.org/10.1016/s0257-8972(02)00666-7

F. Sanchette, C. Ducros, T. Schmitt, et al., Nanostructured hard films deposited by cathodic arc deposition: From concepts to applications. Surf. Coat. Technol. 205, 5444-5453 (2011). doi: 10.1016/j.surfcoat.2011.06.015http://doi.org/10.1016/j.surfcoat.2011.06.015

P.Z. Shi, J. Wang, C.X. Tian, et al., Structure, mechanical and tribological properties of CrN thick films deposited by circular combined tubular arc ion plating. Surf. Coat. Technol. 228, S534-S537 (2012). doi: 10.1016/j.surfcoat.2012.04.041http://doi.org/10.1016/j.surfcoat.2012.04.041

C. Pfohl, A. Bulak, K. Rie, Development of titanium diboride films deposited by PACVD. Surf. Coat. Technol. 131, 141-146 (2000). doi: 10.1016/s0257-8972(00)00752-0http://doi.org/10.1016/s0257-8972(00)00752-0

R. Gilmore, M.A. Baker, P.N. Gibson, et al., Preparation and characterisation of low-friction TiB2-based films by incorporation of C or MoS2. Surf. Coat. Technol. 105, 45-50 (1998). doi: 10.1016/s0257-8972(98)00445-9http://doi.org/10.1016/s0257-8972(98)00445-9

Z.A. Umar, R.S. Rawat, K.S. Tan, et al., Hard TiCx/SiC/a-C:H nanocomposite thin films using pulsed high energy density plasma focus device. Nucl. Instrum. Meth. B 301, 53-61 (2013). doi: 10.1016/j.nimb.2013.03.007http://doi.org/10.1016/j.nimb.2013.03.007

R. Ali, E. Alkhateeb, F. Kellner, et al., Chemical vapor deposition of titanium based ceramic films on low carbon steel: Characterization and electrochemical evaluation. Surf. Coat. Technol. 205, 5454-5463 (2011). doi: 10.1016/j.surfcoat.2011.06.014http://doi.org/10.1016/j.surfcoat.2011.06.014

J. Lin, J.J. Moore, W.C. Moerbe, et al., Structure and properties of selected (Cr-Al-N, TiC-C, Cr-B-N) nanostructured tribological films. Int. J. Refract. Met. Hard. Mater. 28, 2-14 (2010). doi: 10.1016/j.ijrmhm.2009.07.012http://doi.org/10.1016/j.ijrmhm.2009.07.012

J. Lin, J.J. Moore, B. Mishra, et al., The structure and mechanical and tribological properties of TiBCN nanocomposite films. Acta. Mater. 58, 1554-1564 (2010). doi: 10.1016/j.actamat.2009.10.063http://doi.org/10.1016/j.actamat.2009.10.063

Y.H. Lu, Z.F. Zhou, P. Sit, et al., X-Ray photoelectron spectroscopy characterization of reactively sputtered Ti-B-N thin films. Surf. Coat. Technol. 187, 98-105 (2004). doi: 10.1016/j.surfcoat.2003.11.024http://doi.org/10.1016/j.surfcoat.2003.11.024

B. Yang, Z.H. Huang, H.T. Gao, et al., Droplet-free TiC nanocrystal-containing diamond-like carbon films deposited by combined cathodic arc MF magnetron sputtering. Surf. Coat. Technol. 201, 6808-6811 (2007). doi: 10.1016/j.surfcoat.2006.09.082http://doi.org/10.1016/j.surfcoat.2006.09.082

Y. Zheng, X.L. Liu, H.F. Zhang, Properties of Zr-ZrC-ZrC/DLC gradient films on TiNi alloy by the PIIID technique combined with PECVD. Surf. Coat. Technol. 202, 3011-3016 (2008). doi: 10.1016/j.surfcoat.2007.11.004http://doi.org/10.1016/j.surfcoat.2007.11.004

Y.H. Lu, Y.G. Shen, Z.F. Zhou, et al., Phase configuration, nanostructure evolution, and mechanical properties of unbalanced magnetron-sputtered Ti-Cx-Ny thin films. J. Vac. Sci. Technol. A 25, 1539-1546 (2007). doi: 10.1116/1.2784719http://doi.org/10.1116/1.2784719

Q. Wang, F. Zhou, Z. Zhou, et al., Influence of carbon content on the microstructure and tribological properties of TiN(C) films in water lubrication. Surf. Coat. Technol. 206, 3777-3787 (2012). doi: 10.1016/j.surfcoat.2012.03.041http://doi.org/10.1016/j.surfcoat.2012.03.041

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Influence of N2 flow rate on structure and properties of TiBCN films prepared by multi-cathodic arc ion plating and studied with ion beam scattering spectroscopy

DOI：10.1007/s41365-017-0212-0

摘要

Abstract

关键词

Keywords

references

Influence of N₂ flow rate on structure and properties of TiBCN films prepared by multi-cathodic arc ion plating and studied with ion beam scattering spectroscopy