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1.Shanghai Institute of Applied Physics, Chinese Academy of Sciences, Shanghai Synchrotron Radiation Facility, Shanghai 201800, China
Corresponding author, wuyanqing@sinap.ac.cn
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Corresponding author, tairenzhong@sinap.ac.cn
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Published:20 February 2015,
Published Online:02 February 2015,
Received:17 September 2014,
Accepted:14 November 2014
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Cite this article
Shu-Min YANG, Lian-Sheng WANG, Jun ZHAO, et al. Developments at SSRF in soft X-ray interference lithography. [J]. Nuclear Science and Techniques 26(1):010101(2015)
Shu-Min YANG, Lian-Sheng WANG, Jun ZHAO, et al. Developments at SSRF in soft X-ray interference lithography. [J]. Nuclear Science and Techniques 26(1):010101(2015) DOI: 10.13538/j.1001-8042/nst.26.010101.
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