Multilayer polarization elements and their applications to polarimetric studies in vacuum ultraviolet and soft X-ray regions

Multilayer polarization elements and their applications to polarimetric studies in vacuum ultraviolet and soft X-ray regions 1 corresp first-author Corresponding author. E-mail address: watanabemakoto@163.com Corresponding author. E-mail address: watanabemakoto@163.com watanabemakoto@163.com 2 2 3 2 2 2 4 4 5 6 2 2 Shanghai Dianji University, Shanghai 200240, China; Institute of Composite Materials, Shanghai Jiaotong University, China and Venture Business Laboratory, Saga University, Japan Shanghai Dianji University, Shanghai 200240, China; Institute of Composite Materials, Shanghai Jiaotong University, China and Venture Business Laboratory, Saga University, Japan Institute of Multidisciplinary Research for Advanced Materials, Tohoku University, Sendai 980-8577, Japan Institute of Multidisciplinary Research for Advanced Materials, Tohoku University, Sendai 980-8577, Japan Changchun Institute of Optics, Fine Mechanics and Physics, Changchun 130033, China Changchun Institute of Optics, Fine Mechanics and Physics, Changchun 130033, China Japan Synchrotron Radiation Research Institute, SPring-8, Hyogo 679-5198, Japan Japan Synchrotron Radiation Research Institute, SPring-8, Hyogo 679-5198, Japan Institute of Precision Optical Engineering, Tongji University, Shanghai 200092, China Institute of Precision Optical Engineering, Tongji University, Shanghai 200092, China BSRF, Institute of High Energy Physics, Beijing 100049, China BSRF, Institute of High Energy Physics, Beijing 100049, China Multilayer polarization elements and their applications to polarimetric studies in 20~400 eV region are mainly reviewed. General principle of selecting material combinations to get high linear polarizance multilayers of reflection type is given with practical examples, with periodic or non–periodic layer structures depending on the usage. Transmission type is introduced as linear polarizer and phase shifter. Their applications include polarization diagnosis of laboratory optical systems and synchrotron radiation beamlines of linear and circular polarization, magnetic rotation experiments such as Faraday rotation and magnetic Kerr rotation on magnetic films and multilayers, and ellipsometry to measure optical constants of thin films precisely. Polarization analysis of soft X-ray fluorescence using multilayer-coated grating is also mentioned. Finally this review is summarized with outlook of further developments. Vacuum ultraviolet Soft X-ray Synchrotron radiation Multilayer Polarizer Phase shifter References Kunz C ed. Synchrotron radiation. Techniques and applications . 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