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Fabrication of thick BOX SOI by Smart-cut technology

LOW ENERGY ACCELERATOR, RAY TECHNOLOGY AND APPLICATIONS | Updated：2021-01-29

- Fabrication of thick BOX SOI by Smart-cut technology Cover Article Enhanced Publication
- Nuclear Science and Techniques Vol.14, Issue 2, (2003)
- Affiliations：
  
  State Key Laboratory of Functional Materials for Informatics, Shanghai Institute of Microsystem and Information Technology, the Chinese Academy of Sciences,Shanghai,200050
- Author bio：
- Funds：
- DOI： CLC： TN304.05,TN304.1⁺2,O766⁺.1
- Published：01 May 2003，
  
  Published Online：，
  
  Received：31 October 2002，
  
  Revised：，
  
  Accepted：
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Cite this article
Yan-Jun WU, Miao ZHANG, Zheng-Hua AN, et al. Fabrication of thick BOX SOI by Smart-cut technology. [J]. Nuclear Science and Techniques 14(2):115-118(2003)
DOI：

Yan-Jun WU, Miao ZHANG, Zheng-Hua AN, et al. Fabrication of thick BOX SOI by Smart-cut technology. [J]. Nuclear Science and Techniques 14(2):115-118(2003) DOI：

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Fabrication of thick BOX SOI by Smart-cut technology Cover Article Enhanced Publication