Plasma properties of pulsed laser ablation of GaAs

Plasma properties of pulsed laser ablation of GaAs 1 first-author 2 1 2 2 Infrared and Remote Sensing Laboratory, Shandong University, Jinan 250100; Infrared and Remote Sensing Laboratory, Shandong University, Jinan 250100; Department of Physics, Shandong Normal University, Jinan 250014 Department of Physics, Shandong Normal University, Jinan 250014 Simultaneous time and space-resolved emission spectrum from a Nd: YAG laser-ablated plasma on a GaAs target has quantitative information on the generation and the propagation of species in the plasma at 1 atm or lower pressures. The experimental results show that the characteristics of the species in plasma are strongly influenced by the ambient pressure. The time-of-flight distributions of Ga atoms exhibit twin-peak structure, which can be explained by recombination process. The mean projected ranges of As + ions in the atmosphere of different densities were calculated according to Ziegler' theory model and the slowing down processes of them were simulated by using a Monte Carlo simulation program TRIM90. The calculated results are consistent with the experimental. Laser plasma Time-resolved spectroscopy Recombination Projected range. References Bleombergen N . Rev Mod Phys , 1987 ; 59 : S119 Rev Mod Phys Poueyo-Verwaerde A , Fabbro R , Deshors G . J Appl Phys , 1993 ; 74 : 5773 J Appl Phys Vogel A , Schweiger P , Frieser A et al . IEEE J Quantum Electron , 1990 ; 26 : 2240 IEEE J Quantum Electron Niemz M H . Appl Phys , 1994 ; B58 : 273 Appl Phys Girault C , Damiani D , Aubreton J et al . Appl Phys Lett , 1989 ; 54 : 2035 Appl Phys Lett Engst P , Kubat P , Bohacek P et al . Appl Phys Lett , 1994 ; 64 : 2025 Appl Phys Lett Chan W T , Mao X L. , Russo R E . Applied Spectroscopy , 1992 ; 46 : 1025 Applied Spectroscopy Wanniarachchi K A Kumuduni , Yasushi Nakayama , Yoshiki Nakata et al . J Appl Phys , 1993 ; 74 : 7510 J Appl Phys Gu H P , Lou Q H , Cheung N H et al . Appl Phys , 1994 ; B58 : 143 Appl Phys Kuzuya M , Matzumoto H , Takechi H et al . Applied Spectroscopy , 1993 ; 47 : 1659 Applied Spectroscopy Yasuo Iina . Spectrochimica Acta , 1990 : 45B : 1353 Spectrochimica Acta Lee Y I , Thiem T L , Kim G H et al . Applied Spectroscopy , 1992 ; 46 : 1597 Applied Spectroscopy Ziegler J F . In: Ziegler J F ed., The stopping power and ranges in matter . New York : Pergamon Press , 1985 ; Vol.1 , 50 The stopping power and ranges in matter Befeki G . In: Befeki G ed., Principles of laser plasmas . New York : Wiley Interscience , 1976 ; 549 Principles of laser plasmas Pirri A N , Root R G , Wu P K S . AIAA J , 1978 ; 16 : 1296 AIAA J Sappey A D , Gamble T K . Appl Phys , 1991 ; B53 : 353 Appl Phys The Project Supported by National Natural Science Foundation of China 1996-09-20 1997-05-01 2021-02-05 1997 Nuclear Science and Techniques 2 08