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Total dose radiation effects of pressure sensors fabricated onUnibond-SOI materials

Updated：2021-02-05

- Total dose radiation effects of pressure sensors fabricated onUnibond-SOI materials Cover Article Enhanced Publication
- Nuclear Science and Techniques Vol.12, Issue 3, (2001)
- Affiliations：
  
  Department of Microelectronics,Shanghai,200433
- Author bio：
- Funds：
- DOI： CLC： TN386.1
- Published：01 August 2001，
  
  Published Online：，
  
  Received：07 January 2001，
  
  Revised：，
  
  Accepted：
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Cite this article
Shi-Yang ZHU, Yi-Ping HUANG, Jin WANG, et al. Total dose radiation effects of pressure sensors fabricated onUnibond-SOI materials. [J]. Nuclear Science and Techniques 12(3):209-214(2001)
DOI：

Shi-Yang ZHU, Yi-Ping HUANG, Jin WANG, et al. Total dose radiation effects of pressure sensors fabricated onUnibond-SOI materials. [J]. Nuclear Science and Techniques 12(3):209-214(2001) DOI：

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Total dose radiation effects of pressure sensors fabricated onUnibond-SOI materials Cover Article Enhanced Publication