Bin Han; Ze-Song Wang; D. Neena; Bao-Zhu Lin; Bing YANG; Chuan-Sheng Liu; De-Jun Fu

doi:10.1007/s41365-017-0212-0

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Influence of N₂ flow rate on structure and properties of TiBCN films prepared by multi-cathodic arc ion plating and studied with ion beam scattering spectroscopy

NUCLEAR CHEMISTRY, RADIOCHEMISTRY, NUCLEAR MEDICINE | 更新时间：2021-02-23

- Influence of N₂ flow rate on structure and properties of TiBCN films prepared by multi-cathodic arc ion plating and studied with ion beam scattering spectroscopy 封面论文增强出版
- Influence of N₂ flow rate on structure and properties of TiBCN films prepared by multi-cathodic arc ion plating and studied with ion beam scattering spectroscopy
- 核技术（英文版） 2017年 28卷第5期 (2017)
- 作者机构：
  
  Key Laboratory of Artificial Micro- and Nano-Materials of Ministry of Education and School of Physics and Technology, Wuhan University,Wuhan,China,430072;School of Power and Mechanical Engineering, Wuhan University,Wuhan,China,430072
- 作者简介：
- 基金信息：
  
  National Natural Science Foundation of China;International Cooperation Program of the Ministry of Science and Technology of China;Fundamental Research Funds for the Central Universities()
- DOI：10.1007/s41365-017-0212-0 中图分类号：
- 纸质出版日期：2017-05-01，
  
  网络出版日期：2017-03-28，
  
  收稿日期：2016-07-05，
  
  修回日期：2016-10-13，
  
  录用日期：2016-11-02
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Bin Han, Ze-Song Wang, D. Neena, 等. Influence of N₂ flow rate on structure and properties of TiBCN films prepared by multi-cathodic arc ion plating and studied with ion beam scattering spectroscopy[J]. 核技术（英文版）, 2017, 28(5):59

Bin Han, Ze-Song Wang, D. Neena, et al. Influence of N₂ flow rate on structure and properties of TiBCN films prepared by multi-cathodic arc ion plating and studied with ion beam scattering spectroscopy[J]. Nuclear Science and Techniques, 2017, 28(5):59
Bin Han, Ze-Song Wang, D. Neena, 等. Influence of N₂ flow rate on structure and properties of TiBCN films prepared by multi-cathodic arc ion plating and studied with ion beam scattering spectroscopy[J]. 核技术（英文版）, 2017, 28(5):59 DOI： 10.1007/s41365-017-0212-0.

Bin Han, Ze-Song Wang, D. Neena, et al. Influence of N₂ flow rate on structure and properties of TiBCN films prepared by multi-cathodic arc ion plating and studied with ion beam scattering spectroscopy[J]. Nuclear Science and Techniques, 2017, 28(5):59 DOI： 10.1007/s41365-017-0212-0.

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Influence of N₂ flow rate on structure and properties of TiBCN films prepared by multi-cathodic arc ion plating and studied with ion beam scattering spectroscopy 封面论文增强出版