Phase changes of the ZrO2-12 wt%Y2O3 film with Ar+ irradiation

Dezhi WANG; Hailong ZHANG; Bin YANG; Ningkang HUANG

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Phase changes of the ZrO₂-12 wt%Y₂O₃ film with Ar⁺ irradiation

Updated：2021-02-05

- Phase changes of the ZrO₂-12 wt%Y₂O₃ film with Ar⁺ irradiation
- Nuclear Science and Techniques Vol. 10, Issue 1, (1999)
- Affiliations：
  
  1.Institute of Nuclear Science and Technology, Sichuan University, Chengdu 610064
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Dezhi WANG, Hailong ZHANG, Bin YANG, et al. Phase changes of the ZrO₂-12 wt%Y₂O₃ film with Ar⁺ irradiation. [J]. Nuclear Science and Techniques 10(1):31-34(1999)
DOI：

Dezhi WANG, Hailong ZHANG, Bin YANG, et al. Phase changes of the ZrO₂-12 wt%Y₂O₃ film with Ar⁺ irradiation. [J]. Nuclear Science and Techniques 10(1):31-34(1999) DOI：

摘要

Abstract

The zirconia containing 12wt%Y,2,O,3, thin films deposited by r.f. magnetron sputtering at 25℃ or 400℃, and then bombarded with Ar,+, beam at room temperature were characterized with XRD before and after Ar,+, bombardment. It is found that a series of phases formation and transformation happened, among them the most important event is that T' phase appeared after Ar,+, irradiation and the content of the T' phase increased with the increase of Ar,+, ion doses from 5×10,15, to 6×10,16, ions cm,-2,.

关键词

Keywords

Magnetron sputteringZrO2-12wt% Y2O3 filmAr+ irradiationXRD

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Department of Physics, Sri Sivasubramania Nadar College of Engineering, Kalavakkam

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