Research on deposition rate of TiZrV/Pd film by DC magnetron sputtering method

Jie Wang; Bo Zhang; Yan-Hui Xu; Yong Wang

doi:10.1007/s41365-017-0199-6

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Research on deposition rate of TiZrV/Pd film by DC magnetron sputtering method

NUCLEAR CHEMISTRY, RADIOCHEMISTRY, RADIOPHARMACEUTICALS AND NUCLEAR MEDICINE | Updated：2021-02-23

- Research on deposition rate of TiZrV/Pd film by DC magnetron sputtering method
- Nuclear Science and Techniques Vol. 28, Issue 4, Article number: 50(2017)
- Affiliations：
  
  1.National Synchrotron Radiation Laboratory, University of Science and Technology of China, Hefei 230029, China
- Author bio：
  
  Corresponding author: zhbo@ustc.edu.cn
- Funds：
- DOI：10.1007/s41365-017-0199-6
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Jie Wang, Bo Zhang, Yan-Hui Xu, et al. Research on deposition rate of TiZrV/Pd film by DC magnetron sputtering method. [J]. Nuclear Science and Techniques 28(4):50(2017)
DOI：

Jie Wang, Bo Zhang, Yan-Hui Xu, et al. Research on deposition rate of TiZrV/Pd film by DC magnetron sputtering method. [J]. Nuclear Science and Techniques 28(4):50(2017) DOI： 10.1007/s41365-017-0199-6.

摘要

Abstract

An accelerator storage ring needs clean ultra-high vacuum. A TiZrV non-evaporable getter (NEG) film deposited on interior walls of the chamber can realize distributed pumping, effective vacuum improvement and reduced longitudinal pressure gradient. But accumulation of pollutants such as N,2, and O,2, will decrease the adsorption ability of the NEG, leading to a reduction of NEG lifetime. Therefore, an NEG thin film coated with a layer of Pd, which has high diffusion rate and absorption ability for H,2, can extend the service life of NEG and improve the pumping rate of H,2, as well. In this paper, with argon as discharge gas, a magnetron sputtering method is adopted to prepare TiZrV-Pd films in a long straight pipe. By SEM measurement, deposition rates of TiZrV-Pd films are analyzed under different deposition parameters, such as magnetic field strength, gas flow rate, discharge current, discharge voltage and working pressure. By comparing the experimental results with the simulation results based on Sigmund’s theory, the Pd deposition rate ,C, can be estimated by the sputtered depth.

关键词

Keywords

TiZrV-Pddeposition ratesmagnetron sputtering methodnon-evaporable getter

references

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