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Selective growth of diamond by hot filament CVD using patterned carbon film as mask

LOW ENERGY ACCELERATOR, RAY TECHNOLOGY AND APPLICATIONS | Updated：2021-01-29

- Selective growth of diamond by hot filament CVD using patterned carbon film as mask Cover Article Enhanced Publication
- Nuclear Science and Techniques Vol.19, Issue 2, (2008)
- Affiliations：
  
  Shanghai Institute of Applied Physics, Chinese Academy of Sciences,Shanghai,China,201800;Graduate School of Chinese Academy of Sciences,Beijing,China,100049
- Author bio：
- Funds：
- DOI：10.1016/S1001-8042(08)60028-7 CLC： TN304.1⁺8,TN304.055
- Published：20 April 2008，
  
  Published Online：，
  
  Received：21 February 2008，
  
  Revised：，
  
  Accepted：
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Cite this article
Zhoutong HE, Shumin YANG, Qintao LI, et al. Selective growth of diamond by hot filament CVD using patterned carbon film as mask. [J]. Nuclear Science and Techniques 19(2):83-87(2008)
DOI：

Zhoutong HE, Shumin YANG, Qintao LI, et al. Selective growth of diamond by hot filament CVD using patterned carbon film as mask. [J]. Nuclear Science and Techniques 19(2):83-87(2008) DOI： 10.1016/S1001-8042(08)60028-7.

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Selective growth of diamond by hot filament CVD using patterned carbon film as mask Cover Article Enhanced Publication