Overview of SOI materials technology in China

Overview of SOI materials technology in China 1 first-author 1 1 Shanghai Simgui Technology Co., Ltd, 200 Puhui Road, Jiading, Shanghai 201821; Shanghai Institute of Microsystem and Information Technology, the Chinese Academy of Sciences, 865 Changning Road, Shanghai 200050 Shanghai Simgui Technology Co., Ltd, 200 Puhui Road, Jiading, Shanghai 201821; Shanghai Institute of Microsystem and Information Technology, the Chinese Academy of Sciences, 865 Changning Road, Shanghai 200050 In recent years, novel structure SOI materials have been fabricated successfully. Also, SiGeOI (SGOI) material, an ideal substrate for realizing strained-silicon structures, has been investigated by modified SIMOX technology. From 2002, the 100 mm, 125 mm and 150 mm SIMOX wafers have been successfully produced by Shanghai Simgui Technology Co. Ltd, a commercial spin-off of Shanghai Institute of Microsystem and Information Technology (SIMIT), Chinese Academy of Sciences (CAS), and shipped to the semiconductor industry worldwide. This paper presents an outlook for R & D on SOI technologies, and the recent status and future prospect of SIMOX wafers in China. Silicon-on-insulator(SOI) Ion implantation Separation by implanted oxygen (SIMOX) References Colinge J P . Silicon on insulator technology: Materials to VLSI , 2 nd Edition, Kluwer Academic Publishers , 2000 Silicon on insulator technology: Materials to VLSI Izumi K , Doken M , Ariyochi H . Electron Letts , 1978 , 14 : 593 Electron Letts LIN Chenglu , SHEN Zongrong , FANG Fang , et al . Chinese Physics , 1986 , 6 ( 3 ): 661 Chinese Physics LIN Chenglu , ZHOU Wei , ZOU Shichang , et al . Appl Phys Lett , 1989 , 56 : 2004 Appl Phys Lett YU Yuehui , LIN Chenglu , ZOU Shichang , et al . J Phys D: Appl Phys , 1990 , 23 : 449 J Phys D: Appl Phys Zhang M , LIN Chenglu , Hemment P L F , et al . Appl Phys Lett , 1998 , 72 ( 7 ): 630 Appl Phys Lett LIU Weili , ZHANG Miao , LIN Chenglu . Appl Phys Lett , 2001 , 78 : 37 Appl Phys Lett Chen M , Chen J , Zheng W , et al . J Vac Sci & Tech B , 2001 , 19 : 337 J Vac Sci & Tech B Wang X , Chen M , Chen J , et al . Curr Appl Phys , 2001 , 1 : 225 Curr Appl Phys Chen Meng , Wang Xiang , Chen Jing , et al . Appl Phys Lett , 2002 , 80 : 880 Appl Phys Lett Men Chuanling , Xu Zheng , An Zhenghua , et al . Physica B , 2002 , 324 : 229 Physica B Xie Xinyun , Zhang Ninglin , Men Chuanling , et al . Journal of Crystal Growth , 2002 , 245 : 207 Journal of Crystal Growth An Zhenghua , Wu Yanjun , Zhang Miao , et al . Applied Physics Letters , 2003 , 82 : 2452 Applied Physics Letters An Zhenghua , Chu P K , Zhang Miao , et al . Applied Physics Letters , 2003 , 83 : 305 Applied Physics Letters TN405,TN305.3 2005-10-10 2005-12-01 2021-01-19 2005 Nuclear Science and Techniques 06 16