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TiO2 nanofilm growth by Ti ion implantation and thermal annealing in O2 atmosphere
NUCLEAR PHYSICS AND INTERDISCIPLINARY RESEARCH | Updated：2021-01-20
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TiO2 nanofilm growth by Ti ion implantation and thermal annealing in O2 atmosphere
- Nuclear Science and Techniques Vol.26, Issue 3, (2015)
- DOI：10.13538/j.1001-8042/nst.26.030507
Published：20 June 2015，
Published Online：20 June 2015，
Received：13 March 2015，
Accepted：19 April 2015
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