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RBS ANALYSIS OF DAMAGE AND ANNEALING OF ION IMPLANTED InP:Fe

Updated：2021-02-05

- RBS ANALYSIS OF DAMAGE AND ANNEALING OF ION IMPLANTED InP:Fe Cover Article Enhanced Publication
- Nuclear Science and Techniques Vol.1, Issue 1-2, (1990)
- Affiliations：
  
  Shanghai Institute of Metallurgy, Academia Sinica,Shanghai,China,200050
- Author bio：
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- DOI： CLC：
- Published：01 May 1990，
  
  Published Online：，
  
  Received：1989-11，
  
  Revised：，
  
  Accepted：
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Honglie Shen, Genqing Yang, Zuyao Zhou, et al. RBS ANALYSIS OF DAMAGE AND ANNEALING OF ION IMPLANTED InP:Fe. [J]. Nuclear Science and Techniques 1(1-2):113-116(1990)
DOI：

Honglie Shen, Genqing Yang, Zuyao Zhou, et al. RBS ANALYSIS OF DAMAGE AND ANNEALING OF ION IMPLANTED InP:Fe. [J]. Nuclear Science and Techniques 1(1-2):113-116(1990) DOI：

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RBS ANALYSIS OF DAMAGE AND ANNEALING OF ION IMPLANTED InP:Fe Cover Article Enhanced Publication