ION IMPLANTATION OF DIAMOND-LIKE CARBON FILMS

项金钟; 郑志豪; 廖常庚; 熊京; 汪永强; 张仿清

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ION IMPLANTATION OF DIAMOND-LIKE CARBON FILMS

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- ION IMPLANTATION OF DIAMOND-LIKE CARBON FILMS
- ION IMPLANTATION OF DIAMOND-LIKE CARBON FILMS
- 核技术（英文版） 1992年3卷第1期
- 作者机构：
  
  1.East China Normal University, Shanghai 200062, China
  2.Lanzhou University, Lanzhou 730000, China; Ion Beam Laboratory, Shanghai Institute of Metallurgy, Academia Sinica, Shanghai 200051, China
- 作者简介：
- 基金信息：
- DOI：中图分类号：
- 纸质出版日期：1992-02-01，
  
  收稿日期：1990-10，
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项金钟, 郑志豪, 廖常庚, 等. ION IMPLANTATION OF DIAMOND-LIKE CARBON FILMS[J]. 核技术（英文版）, 1992, 3(1):25-29.

Jinzhong Xiang, Zhihao Zheng, Changgeng Liao, et al. ION IMPLANTATION OF DIAMOND-LIKE CARBON FILMS[J]. Nuclear Science and Techniques, 1992, 3(1):25-29.
项金钟, 郑志豪, 廖常庚, 等. ION IMPLANTATION OF DIAMOND-LIKE CARBON FILMS[J]. 核技术（英文版）, 1992, 3(1):25-29. DOI：

Jinzhong Xiang, Zhihao Zheng, Changgeng Liao, et al. ION IMPLANTATION OF DIAMOND-LIKE CARBON FILMS[J]. Nuclear Science and Techniques, 1992, 3(1):25-29. DOI：

ION IMPLANTATION OF DIAMOND-LIKE CARBON FILMS 1 first-author 1 2 2 2 2 East China Normal University, Shanghai 200062, China East China Normal University, Shanghai 200062, China Lanzhou University, Lanzhou 730000, China; Ion Beam Laboratory, Shanghai Institute of Metallurgy, Academia Sinica, Shanghai 200051, China Lanzhou University, Lanzhou 730000, China; Ion Beam Laboratory, Shanghai Institute of Metallurgy, Academia Sinica, Shanghai 200051, China Diamond-like carbon (DLC) films (a-C:H) were implanted by 140 keV and 110 keV Ar ion beams. The resistivities of the implanted films decreased dramatically under a dose of 2×10 16 Ar/cm 2 . IR spectra and optical gap E opt were measured. It was found that the sp 2 and sp 3 components decreased due to the loss of hydrogen during implantation, and the ratio of components sp 2 bonds to sp 3 bonds increased with the ion dose. And the optical gap E opt decreased from 1.46 eV to 0.83 eV. The hydrogen (bonded and unbonded) contents in the films were measured with the nuclear resonant reaction 1 H( 19 F, χ γ) 16 O. It is shown that hydrogen plays an important role in affecting some properties of DLC fims. Ion implantation Diamond-like film REFERENCES Anderson L P . Thin Solid Films , 1986 , 86 : 193 . Thin Solid Films Prawer S , Kalish R , Adel M et al . Appl Phys Lett , 1986 , 49 : 1157 . Appl Phys Lett Kerwin D B , Spain I L , Robinson R S . Thin Solid Films , 1987 , 48 : 311 . Thin Solid Films Spitsyn B V , Bouilov L L , Derjaguin B V . Prog Crytal Growth and Charact , 1988 , 17 : 79 . Prog Crytal Growth and Charact Smith F W . J Appl Phys , 1984 : 55 : 764 . J Appl Phys Prawer S , Kalish R , Adel M . Appl Phys Lett , 1986 , 48 : 1585 . Appl Phys Lett Armour D G . Vacuum , 1987 , 37 : 423 . Vacuum Corderc P , Catherine Y . Thin Solid Films , 1987 , 146 : 93 . Thin Solid Films Anderson D A . Philos Mag , 1977 , 36 : 17 . Philos Mag Zheng Zhihao , Wang Yongqiang , Liao Changgeng et al , Vacuum , 1990 , 40 : 505 . Vacuum 1992-02-01 2021-02-05 1992 Nuclear Science and Techniques 1 3

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