您当前的位置：

首页 >

文章列表页 >

A SMALL UNBALANCED MAGNETRON SPUTTERING SOURCE WITH MULTIPOLE MAGNETIC FIELD ANODE

更新时间：2021-02-05

- A SMALL UNBALANCED MAGNETRON SPUTTERING SOURCE WITH MULTIPOLE MAGNETIC FIELD ANODE 封面论文增强出版
- A SMALL UNBALANCED MAGNETRON SPUTTERING SOURCE WITH MULTIPOLE MAGNETIC FIELD ANODE
- 核技术（英文版） 1994年 5卷第2期 (1994)
- 作者机构：
  
  Institute of Nuclear Science and Technology. Sichuan University,Chengdu,China,610064
- 作者简介：
- 基金信息：
  
  National Natural Science Foundation of China();Commission of Science();Technology of Sichuan Province()
- DOI：中图分类号：
- 纸质出版日期：1994-05-01，
  
  网络出版日期：，
  
  收稿日期：1993-10-30，
  
  修回日期：，
  
  录用日期：
扫描看全文
引用本文
郑思孝, 孙官清, 廖小东. A SMALL UNBALANCED MAGNETRON SPUTTERING SOURCE WITH MULTIPOLE MAGNETIC FIELD ANODE[J]. 核技术（英文版）, 1994, 5(2):113-115.

Sixiao Zheng, Guanqing Sun, Xiaodong Liao. A SMALL UNBALANCED MAGNETRON SPUTTERING SOURCE WITH MULTIPOLE MAGNETIC FIELD ANODE[J]. Nuclear Science and Techniques, 1994, 5(2):113-115.
郑思孝, 孙官清, 廖小东. A SMALL UNBALANCED MAGNETRON SPUTTERING SOURCE WITH MULTIPOLE MAGNETIC FIELD ANODE[J]. 核技术（英文版）, 1994, 5(2):113-115. DOI：

Sixiao Zheng, Guanqing Sun, Xiaodong Liao. A SMALL UNBALANCED MAGNETRON SPUTTERING SOURCE WITH MULTIPOLE MAGNETIC FIELD ANODE[J]. Nuclear Science and Techniques, 1994, 5(2):113-115. DOI：

浏览量

下载量

总被引

文章被引用时，请邮件提醒。

提交

工具集

关联资源

A COMPLEX-TYPE FOCUSSED MAGNETRON FOR SPUTTERING

A SMALL UNBALANCED MAGNETRON SPUTTERING SOURCE WITH MULTIPOLE MAGNETIC FIELD ANODE 封面论文 增强出版

A SMALL UNBALANCED MAGNETRON SPUTTERING SOURCE WITH MULTIPOLE MAGNETIC FIELD ANODE 封面论文增强出版