Phase changes of the ZrO₂-12 wt%Y₂O₃ film with Ar⁺ irradiation

Phase changes of the ZrO 2 -12 wt%Y 2 O 3 film with Ar + irradiation 1 first-author 1 1 1 Institute of Nuclear Science and Technology, Sichuan University, Chengdu 610064 Institute of Nuclear Science and Technology, Sichuan University, Chengdu 610064 The zirconia containing 12wt%Y 2 O 3 thin films deposited by r.f. magnetron sputtering at 25℃ or 400℃, and then bombarded with Ar + beam at room temperature were characterized with XRD before and after Ar + bombardment. It is found that a series of phases formation and transformation happened, among them the most important event is that T' phase appeared after Ar + irradiation and the content of the T' phase increased with the increase of Ar + ion doses from 5×10 15 to 6×10 16 ions cm -2 . Magnetron sputtering ZrO 2 -12wt% Y 2 O 3 film Ar + irradiation XRD References Kim E T , Yoon S G . Thin Solid Films , 1993 , 227 : 7 Thin Solid Films Kao A S , Gorman G L . Appl Phys , 1990 , 67 : 3826 Appl Phys Miller R A , Garlick R G , Smialek J L . Am Ceram Soc Bull , 1983 , 62 ( 2 ): 1355 Am Ceram Soc Bull Huang N K , Feng Z R , Wang D Z . Thin Solid Films , 1992 , 221 : 9 Thin Solid Films Mesbah M , Boyer A , Groubert E et al . J Vac Sci Technol , 1990 , A8 ( 6 ): 3961 J Vac Sci Technol Knoll R W , Bradley E R ,. PNL-SA-11504 , 1983 , DE84003352 PNL-SA-11504 Moss M . Acta Metall , 1968 , 16 : 325 Acta Metall Scott H G , Mat J . J Mat Sci , 1975 , 10 : 1527 J Mat Sci Borom M P , Johnson C A . Surf Coat Technol , 1992 , 54/55 : 45 Surf Coat Technol The Project Supported by National Natural Science Foundation of China 1988-07-01 1999-02-01 2021-02-05 1999 Nuclear Science and Techniques 1 10