Yi-Fei Zhang; Hong-Xin Luo; Zhi GUO; Xiang-Jun Zhen; Ming Chen; Jun-Nan Liu

doi:10.1007/s41365-017-0274-z

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Cleaning of carbon contaminated optics using O₂/Ar plasma

SYNCHROTRON RADIATION TECHNOLOGY AND APPLICATIONS | Updated：2021-02-23

- Cleaning of carbon contaminated optics using O₂/Ar plasma Cover Article Enhanced Publication
- Nuclear Science and Techniques Vol.28, Issue 9, (2017)
- Affiliations：
  
  Shanghai Institute of Applied Physics, Chinese Academy of Sciences,Shanghai,China,201204
- Author bio：
- Funds：
- DOI：10.1007/s41365-017-0274-z CLC：
- Published：01 September 2017，
  
  Published Online：05 August 2017，
  
  Received：21 October 2016，
  
  Revised：12 April 2017，
  
  Accepted：16 April 2017
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Cite this article
Yi-Fei Zhang, Hong-Xin Luo, Zhi GUO, et al. Cleaning of carbon contaminated optics using O₂/Ar plasma. [J]. Nuclear Science and Techniques 28(9):127(2017)
DOI：

Yi-Fei Zhang, Hong-Xin Luo, Zhi GUO, et al. Cleaning of carbon contaminated optics using O₂/Ar plasma. [J]. Nuclear Science and Techniques 28(9):127(2017) DOI： 10.1007/s41365-017-0274-z.

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