DEPTH PROFILING OF 1H AND/OR 4He IN SOLIDS BY ERD WITH 19F IONS

朱沛然; 刘家瑞; 任孟眉; 封爱国; 李大万

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DEPTH PROFILING OF ¹H AND/OR ⁴He IN SOLIDS BY ERD WITH ¹⁹F IONS

Updated：2021-02-05

- DEPTH PROFILING OF ¹H AND/OR ⁴He IN SOLIDS BY ERD WITH ¹⁹F IONS
- DEPTH PROFILING OF ¹H AND/OR ⁴He IN SOLIDS BY ERD WITH ¹⁹F IONS
- 核技术（英文版） 1990年1卷第1-2期
- Affiliations：
  
  1.Institute of Physics, Academia Sinica, Beijing 100080, China
  2.Central Institute of Nationality, Beijing 100081, China
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朱沛然, 刘家瑞, 任孟眉, 等. DEPTH PROFILING OF ¹H AND/OR ⁴He IN SOLIDS BY ERD WITH ¹⁹F IONS[J]. 核技术（英文版）, 1990,1(1-2):65-69.

Peiran Zhu, Jiarui Liu, Mengmei Ren, et al. DEPTH PROFILING OF ¹H AND/OR ⁴He IN SOLIDS BY ERD WITH ¹⁹F IONS[J]. Nuclear Science and Techniques, 1990,1(1-2):65-69.
朱沛然, 刘家瑞, 任孟眉, 等. DEPTH PROFILING OF ¹H AND/OR ⁴He IN SOLIDS BY ERD WITH ¹⁹F IONS[J]. 核技术（英文版）, 1990,1(1-2):65-69. DOI：

Peiran Zhu, Jiarui Liu, Mengmei Ren, et al. DEPTH PROFILING OF ¹H AND/OR ⁴He IN SOLIDS BY ERD WITH ¹⁹F IONS[J]. Nuclear Science and Techniques, 1990,1(1-2):65-69. DOI：

摘要

Abstract

1,H or ,4,He depth profiling in ,1,H or ,4,He implanted silicon samples was performed by elastic recoil detection (ERD) with multicharged ,19,F ions at a small accelerator. Optimization of the experimental parameters such as incident ions energy and scattering geometry were calculated by computer simulation. Depth resolution of about 20-30nm at depth of 400nm for,1,H and at depth of 300nm for ,4,He can be obtained, respectively.

关键词

Keywords

Elastic recoil detectionDepth profiling

references

J. Ziegler ed., New uses of ion accelerators. Plenum Press. 1975.

J. L'Ecuyer et al., J. Appl. Phys., 47 (1976), 381.

Lao Fei et al., Chinese J. Nucl. Phys., 3 (1986), 257.

Liu Jiarui et al., Aeta Phys. Sinica, 37 (1988), 71.

J. Ziegler et al., The Stopping and range of ions in matter. Plenum Press, 1985.

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CALCULATION AND OPTIMIZATION OF EXPERIMENTAL PARAMETERS IN ELASTIC RECOIL DETECTION (ERD)

相关机构

Institute of Applied Electronics of CAEP

Graduate School of China Academy of Engineering PhysicsCAEP

Department of Nuclear Science, Fudan University

Central Institute of Nationalities

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