Schwarzschild microscopes in vacuum ultraviolet and soft X-ray regions

SYNCHROTRON TECHNOLOGY AND APPLICATIONS

Schwarzschild microscopes in vacuum ultraviolet and soft X-ray regions

M. WATANABE，

M. YANAGIHARA，

T. EJIMA，

M. TOYODA，

Y. KONDO，

T. HATANO，

T. TSURU，

M. YAMAMOTO

Nuclear Science and Techniques

Vol.16, No.3

pp.129-138

Published in print 01 Jun 2005

CLC：TH742,O434.19

25500

Microscopes in vacuum ultraviolet and soft X-ray regions using a normal incidence type of Schwarzschild objective are reviewed. The objective consists of a concave mirror and a convex mirror coated with a high reflectance multilayer, having a large numerical aperture comparing with other objectives. The microscopes have been used to diagnose inertia-confinement-fusion plasmas, and to investigate small samples or microstructures of inorganic and organic materials by imaging them using laboratory light sources. Synchrotron radiation has been also used to obtain a microbeam for a photoelectron scanning microscope with a spatial resolution of 0.1 μm. The structure and performance of two laboratory microscopes developed at Tohoku University are demonstrated. One of them is a soft X-ray emission imaging microscope. An image of an artificial pattern made of W and SiO₂ on Si wafer by focusing Si L emission was presented. The other is an ultraviolet photoelectron scanning microscope using a He (helium) gas discharge lamp. The valence band spectra of a microcrystal of FeWO₄ were presented. Furthermore other applications such as demagnifying optics for lithography and optics to gather fluorescence for emission spectroscopy are introduced.

MicroscopeSchwarzschild objectiveMultilayerVacuum ultravioletSoft X-rayPhotoelectron

References

[1]

Born M, Wolf E. Principles of optics (7th ed.). Cambridge (UK): Cambridge University Press, 1999: 466

[2]

Michette A. Optical systems for soft X-rays. New York (USA): Plenum Press, 1986: 254

[3]

Attwood D. Soft X-ray and extreme ultraviolet radiation, principles and applications. Cambridge (UK): Cambridge University Press, 1999: 107, 337

[4]

Schwarzschild K.

Abh. Ges. Wiss. Göttingen Math

. Phys. Klasse 9, 1905, Ⅳ No.1-3

Baidu Scholar

Google Scholar

[5]

Snigirev A, Kohn V, Snigireva I et al. Nature, 1996, 384: 49

[6]

Erdes P. J Opt Soc Am, 1959, 49: 877

[7]

Toyoda M. Abs. Annual Meeting of Japanese Society of Applied Physics, 2005: 29a-YX-10/Ⅱ

[8]

Yanagihara M, Yamashita K. in X-ray spectrometry: Recent technological advances, ed. by Tsuji K, Injuk J, Van Grieken R. Chichester (UK): John Wiley & Sons, 2004: 63

[9]

Henke B L, Gullikson E M, Davis J C. At Data and Nucl Data Tables, 1993, 54: 181. See also http://www-crxo.lbl.gov/optical_constants/

[10]

Cao J, Yanagihara M, Yamamoto M et al. Appl Opt, 1994, 33: 2013

[11]

Bajt S, Alameda J B, Barbee T W et al. Opt Eng, 2002, 41: 1797

[12]

Ishino M, Yoda O. J Appl Phys, 2002, 92: 4952

[13]

Hu W, Hatano T, Yamamoto M et al. J Synch Rad, 1998, 5: 732

[14]

Eriksson F, Gullikson E M, Johansson E M et al. Abs. of 6th int. conf. on physics of X-ray multilayer structures, Chamonix Mont-Blanc, 2002: 2

[15]

Ejima T, Kondo Y, Watanabe M. Jpn J Appl Phys, 2001, 40: 376

[16]

Hatano T, Kubota S, Adachi Y et al. Proc. of 8th int. conf. on synchrotron radiation instrumentation, Berkeley, 2003: AIP (American Institute of Physics) Conference Proceedings, 2004, 705: 839

[17]

Cao J, Ma Y, Zhang J et al. Chinese Journal of Lasers (in Chinese), 1995, A22: 465

[18]

Wang H, Wang Z, Qin S et al. Acta Optica Sinica (in Chinese), 2003, 23: 1362

[19]

Kado M, Tanaka K A, Kodama R et al. Opt Lett, 1991, 16: 109

[20]

Artioukov I, Vinogradov A, Asadchikov V et al. Opt Lett, 1995, 20: 2451

[21]

Ng W, Ray-Chaudhuri A, Cole R et al. Physica Scripta, 1990, 41: 758

[22]

Barbo F, Bertolo M, Bianco A et al. Rev Sci Instr, 2000, 71: 5

[23]

Toyoda M, Shitani Y, Yanagihara M et al. Jpn J Appl Phys, 2000, 39: 1926

[24]

Shitani Y, Miyata N, Yanagihara M et al. Optics and Precision Engineering (China), 2001, 9: 446

[25]

Kondo Y, Ejima T, Takatsuka H et al. Surf Rev Lett, 2002, 9: 521

[26]

Yamamoto M, Yanagihara M, Hatano T et al. Specially Promoted Research of Ministry of Education, Culture, Sports, Science and Technology, Japan (2003-2007)

[27]

Kinoshita H, Watanabe T. Jpn J Appl Phys, 2000, 39: 6771

[28]

Kinoshita H. in X-ray imaging optics, ed. by Namioka T, Yamashita K. Tokyo (Japan): Baifukan, 1999: 148 (in Japanese)

[29]

Kunz C, Voss J. Rev Sci Instr, 1995, 66: 2021