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Multilayer polarization elements and their applications to polarimetric studies in vacuum ultraviolet and soft X-ray regions

SYNCHROTRON TECHNOLOGY AND APPLICATIONS

Multilayer polarization elements and their applications to polarimetric studies in vacuum ultraviolet and soft X-ray regions

WATANABE Makoto
HATANO Tadashi
SAITO Katsuhiko
HU Weibing
EJIMA Takeo
TSURU Toshihide
TAKAHASHI Masahiko
KIMURA Hiroaki
HIRONO Toko
WANG Zhangshan
CUI Mingqi
YAMAMOTO Masaki
YANAGIHARA Mihiro
Nuclear Science and TechniquesVol.19, No.4pp.193-203Published in print 20 Aug 2008
39300

Multilayer polarization elements and their applications to polarimetric studies in 20~400 eV region are mainly reviewed. General principle of selecting material combinations to get high linear polarizance multilayers of reflection type is given with practical examples, with periodic or non–periodic layer structures depending on the usage. Transmission type is introduced as linear polarizer and phase shifter. Their applications include polarization diagnosis of laboratory optical systems and synchrotron radiation beamlines of linear and circular polarization, magnetic rotation experiments such as Faraday rotation and magnetic Kerr rotation on magnetic films and multilayers, and ellipsometry to measure optical constants of thin films precisely. Polarization analysis of soft X-ray fluorescence using multilayer-coated grating is also mentioned. Finally this review is summarized with outlook of further developments.

Vacuum ultravioletSoft X-raySynchrotron radiationMultilayerPolarizerPhase shifter
References
[1] Kunz C ed. Synchrotron radiation. Techniques and applications. Berlin, Heidelberg (Germany): Springer-Verlag, 1979.
[2] Winick H, Doniach S eds. Synchrotron radiation research. New York (USA): Plenum Press, 1980.
[3] Thompson A C, Vaughan D eds. X-ray data booklet (LBNL/PUB-490R Rev.2). Berkeley (USA): Center for X-Ray Optics and Advanced Light Source, 2001.
[4] Watanabe M, Isoyama G. In: X-ray spectrometry: Recent technological advances (ed. by Tsuji K, Injuk J, Van Grieken R). Chichester (UK): John Wiley & Sons, 2004, Chap 2.2, 29-47.
[5] Ma L, Yang F. Introduction to synchrotron radiation application (2nd ed.). Shanghai (China): Fudan University Press, 2005 (in Chinese).
[6] Jenkins F A, White H E. Fundamentals of physical optics. New York (USA): McGraw-Hill, 1937.
[7] Guo Y ed. Optics. Beijing (China): Higher Education Press, 2006 (in Chinese).
[8] Hunter W R. In: Vacuum ultraviolet spectroscopy I (ed. by Samson J A, Ederer D L). New York (USA): Academic Press, 1998, Chap 12, 227-255.
[9] Hart M, Rodrigues R D. J Appl Cryst, 1978, 11: 248-253.
[10] Hirano K, Izumi K, Ishikawa T, et al. Jpn J Appl Phys, 1991, 30: L407-L410.
[11] Koide T, Shidara T, Yuri M, et al. Rev Sci Instrum, 1992, 63: 1458-1461.
[12] Naik S R, Lodha G S. Nucl Instrum Methods Phys Res, 2006, A560: 211-218.
[13] Dhez P. Nucl Instrum Methods, 1987, A 261: 66-71.
[14] Yanagihara M, Yamashita K. In: X-ray spectrometry: Recent technological advances (ed. by Tsuji K, Injuk J, Van Grieken R). Chichester (UK): John Wiley & Sons, 2004, Chapter3.1, 63-78.
[15] Schaefers F. Optics and Precision Engineering (China), 2007, 15: 1850-1861 and references therein
[16] Hatano T, Kondo Y, Saito K, et al. Surf Rev Lett, 2002, 9: 587-591.
[17] Yamamoto M, Nakayama S, Namioka T. Proc SPIE 984, 1988, 984: 160-165.
[18] Henke B L, Gullikson E M, Davis J C. At Data and Nucl Data Tables, 1993, 54: 181-342. http://www-crxo.lbl.gov/ optical_constants/
[19] Hirai Y, Takahashi H, Komuro M, et al. J Electron Spectrosc Relat Phenom, 1996, 80: 385-388.
[20] Ishikawa S, Imazono T, Hatano T, et al. Appl Opt, 2002, 41: 763-767.
[21] Kortright J B, Rice M, Karr R. Phys Rev, 1995, B 51: 10240-10243.
[22] Hatano T, Hu W, Saito K, et al. J Electron Spectrosc Relat Phenom, 1999, 101-103: 287-291.
[23] Yanagihara M, Maehara T, Nomura H, et al. Rev Sci Instrum, 1992, 63: 1516-1518.
[24] Wang Z, Wang H, Zhu J, et al. J Appl Phys, 2006, 99: 056108-056110.
[25] Wang Z, Wang H, Zhu J, et al. Appl Phys Lett, 2006, 89: 2411201-2411203.
[26] Hu W, Hatano T, Yamamoto M, et al. J Synchrotron Radiat, 1998, 5: 732-734.
[27] Hatano T, Hu W, Yamamoto M, et al. J Electron Spectrosc Relat Phenom, 1998, 92: 311-314.
[28] Nomura H, Mayama K, Sasaki S, et al. Proc SPIE, 1992, 1720: 395-401.
[29] Kortright J B, Underwood J H. Nucl Instrum Method, 1990, A291: 272-277.
[30] Yamamoto M, Nomura H, Yanagihara M, et al. J Electron Spectrosc Relat Phenom, 1999, 101-103: 869-873.
[31] Hirono T, Kimura H, Muro T, et al. J Electron Spectrosc Relat Phenom, 2005, 144-147: 1097-1099.
[32] Kimura H, Hirono T, Tamenori Y, et al. J Electron Spectrosc Relat Phenom, 2005, 144-147: 1079-1091.
[33] Takahashi M, Hatano T, Ejima T, et al. J Electron Spectrosc Relat Phenom, 2003, 130: 79-84.
[34] Cui M, Wang Z, Sun L, et al. Presented at 9th Int Conf on Physics of X-ray Multilayer Structures (Montana, USA), 2008.
[35] Hirono T, Kimura H, Tamenori Y, et al. AIP Conf Proc, 8th International Conference on Synchrotron Radiation Instrumentation, 2004, 705: 187-190.
[36] Chen K, Cui M, Yan F, et al. Chin Phys Lett, 2008, 25:1110-1112.
[37] Saito K, Igeta M, Ejima T, et al. J Electron Spectrosc Relat Phenom, 2005, 144-147: 757-760.
[38] Tsuru T, Yamamoto M. Phys Stat Sol (c), 2008, 5: 1129-1132.
[39] Hunter W R. Vacuum ultraviolet spectroscopy I (ed. by Samson J A, Ederer D L). New York (USA): Academic Press, 1998,Chap 18, 379-399.
[40] Ishikawa S, Ichikura S, Imazono T, et al. Opt Rev, 2003, 10: 58-62.
[41] Attwood D. Soft X-rays and extreme ultraviolet radiation: Principle and applications. Cambridge (UK): Cambridge University Press, 1999.