Simulation of monolithic active pixel sensor with high resistivity epitaxial layer

LOW ENERGY ACCELERATOR AND RADIATION APPLICATIONS

Simulation of monolithic active pixel sensor with high resistivity epitaxial layer

FU Min，

TANG Zhenan

Nuclear Science and Techniques

Vol.22, No.5

pp.265-271

Published in print 20 Oct 2011

DOI：10.13538/j.1001-8042/nst.22.265-271

36800

The time and efficiency of charge collection are the key factors of monolithic active pixel sensor devices for minimum ionizing particles tracking detection. In this paper, 3D models of pixels with different resistivity epitaxial layers (epi-layers) are built and simulated using Synopsys-Sentaurus. The basic characteristics of detectors are evaluated, including electric potential, electric field, and depleted region. Results indicate that the high resistivity (HR) epi-layer is a better choice. Further, simulation results show that the key collection performance is significantly improved owing to a wider and stronger electric field in the N type HR epi-layer.

Monolithic active pixel sensorCharge collectionHigh resistivitySimulation

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