Investigation of vacuum performances of TiZrV coated pipe

SYNCHROTRON SCIENCE AND TECHNOLOGY

Investigation of vacuum performances of TiZrV coated pipe

ZHANG Haiou，

DAI Dongdong，

TANG Ziyi，

ZHANG Jidong，

SHAO Bin，

HE Suixia

Nuclear Science and Techniques

Vol.22, No.6

pp.326-329

Published in print 20 Dec 2011

DOI：10.13538/j.1001-8042/nst.22.326-329

30000

Some metal compounds called as Non-Evaporable-Getter have been widely used to improve vacuum system performance of accelerator facility. In this paper, a TiZrV film on the surface of stainless steel vacuum pipe is made by direct current magnetron sputtering, and its vacuum performance is experimentally studied. Our results show that the TiZrV film is partly activated at 160°C, and its pressure performance is similar with one at higher temperature. The coating reduces the ultimate pressure and prominently shortens the pressure-down time in a sputter ion pump system, thus creating evenly distributed pressure profile in a coating pipe. The adsorption rate is steady, and adsorption amount increases linearly. Such TiZrV-coated pipe behaves like pump other than gas source in vacuum system.

TiZrVActivationAdsorptionPressureDirect current magnetron sputtering

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