PREFERENTIAL SPUTTERING OF Cu76Ni15Sn9

PREFERENTIAL SPUTTERING OF Cu₇₆Ni₁₅Sn₉

Wang Zhenxia，

Pan Jisheng，

Zhang Jiping，

Wang Chuanshan，

Luo Wenyun，

Zhou Shuxin，

Zhang Huiming，

Zeng Yuewu

Nuclear Science and Techniques

Vol.6, No.1

pp.22-27

Published in print 01 Feb 1995

28600

Using collection film technique combined with Auger electron spectroscopy is analysis, the preferential sputtering of the ternary alloy Cu₇₆Ni₁₅Sn₉ bombarded with 27 keV Ar⁺ at normal incidence is studied. After bombardment, the target surface is examined with SEM, and the surface composition of different topographical feature areas is measured with electron probe micro-analyser (EPMA). The experiment results show that Cu atoms are preferentially ejected compared with Ni atoms, and Sn atoms come third within the ejection angle range from 0° to 60°. The results are discussed from the viewpoint of sputtering from a very rough surface.

Auger electron spectroscopyTopographyPreferential sputteringCu76Ni15Sn9

REFERENCES

Betz G, Arias M, Braun P. Nucl Instr Meth, 1980; 170: 347

Betz G, Dudonis J, Braun P. Surf Sci, 1981; 104: L185

Mattieu H J, Landolt D. Appl Surf Sci, 1979; 3: 348

Wittmaack K, Blank P. Nucl Instr Meth, 1980; 170: 331

Wang Zhenxia, Pan Jisheng, Zhang Jiping et al. J Mater Sci Lett, 1992; 11: 719

Wang Zhenxia, Pan Jisheng, Zhang Jiping et al. Nucl Instr Meth, 1993; B74: 380

Lewis J E, Ho P S. J Vac Sci Technol, 1979; 16: 772

Betz G. Surf Sci, 1980; 92: 283

Shimizu R. Nucl Instr Meth, 1987; B18: 486

Lam N Q. Nucl Instr Meth, 1992; B71: 371

Matsunami N, Yamamura Y et al. Energy dependence of the yields ion-induced sputtering of monatomic solids, IPPJ-AM-32. Institute of Plasma Physics, Nagoya University, 1983

Kelly R. In: Kelly R, da, eds. Silva M F. Materials modification by high-fluence ion beams. London: Kluwer Academic Publishers, 1989: 305

Whitton J L, Kiriakidis G, Carter G et al. Nucl Instr Meth, 1984; B2: 640

Whitton J L, Holck O, Carter G et al. Nucl Instr Meth, 1980; 170: 371

Tanovic L, Tanovic N. Nucl Instr Meth, 1987; B18: 538

Roosendaal H E. In: Behrisch I R, ed. Sputtering by particle bombardment. New York: Springer-Verlag, 1981: 219