MoSx FILMS DEPOSITED ON DIFFERENT MATRIXES BY ION BEAM TECHNIQUE

Wang Peilu，

Liu Zhongyang，

Jiang Jingyun，

Gou Fujun，

Yang Xingfu

Nuclear Science and Techniques

Vol.6, No.3

pp.178-182

Published in print 01 Aug 1995

27100

MoSx (x=1.79〜2.34) films of 200 nm thickness are deposited onto brass and C20 steel substrates by the ion beam assisted technique, respectively. Structures and compositions of these films, and changes in valence states of the Mo element are examined by XRD and XPS before and after wear. The lubrication properties and wear resistances for two kinds of samples are evaluated using a pin-on-disk installation in atmosphere at the room temperature. Tribo-wear behaviours and the microstructures between two kinds of samples exhibit obvious differences.

Molybdenum disulphideIon beam assisted depositionFrictionWear

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