STUDY OF THE FOCUSED ION BEAM AND ITS APPLICATION TO METAL IMPLANTATION MODIFICATION

Zheng Sixiao

Nuclear Science and Techniques

pp.217-221

Published in print 01 Nov 1993

46000

The properties and designment of the strong focusing lens system and the application to metal modification of gear cutting tools are described. The focused ion beam produced by a special three asymmetric voltage lens has the unique features of short midfocal length, strong focusing and omitted focusing electric power. These properties of strong focusing lens system are due to the application of the high energy ratio of 20 to 50 onto the lens.

Strong focussing lensFocussed ion beam Metalmodification

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