COMPOSITIONAL ANALYSIS OF HIGH- TEMPERATURE SUPERCONDUCTOR THIN FILMS BY HIGH ENERGY ELASTIC BACKSCATTERING OF HELIUM IONS

COMPOSITIONAL ANALYSIS OF HIGH- TEMPERATURE SUPERCONDUCTOR THIN FILMS BY HIGH ENERGY ELASTIC BACKSCATTERING OF HELIUM IONS

Wu Shiming
Cheng Huansheng
Zhang Chengteng
Yao Xiaowei
Zhao Guoqing
Yang Fujia
Hua Zhongyi
Nuclear Science and TechniquesVol.1, No.1-2pp.89-92Published in print 01 May 1990
4100

High energy ion backscattering can be used to enhance the sensitivity of oxygen analysis. At He++ ion energy of 8.8 MeV, the yield due to oxygen is about 25 times larger than that predicted by Rutherford formula. The elemental stoichiometry of some bulk and thin film superconductor samples was determined. The details of the measuring method are discribed.

High energy ion backscatteringHigh temperature superconductor
REFERENCES
[1] Cheng Huansheng et al., Chinese J. Low Temp. Phys., 9 (1987), 201.
[2] J.A. Martin et al., Appl. Phys. Lett., 52 (1988), 2177.
[3] J.F. Ziegler ed., New uses of ion accelerators, Plenum Press, New York, p.135.