The penetration depth and concentration distribution of implanted ions have been studied for low energy heavy ions implanted in the dry seeds of plant, such as peanut, mung bean, sunflower, wheat and radish seeds, etc. by SEM+EDS. The results show that the maximum penetration depth is about 12µm for V⁺ with an energy 200 keV implanted in cotyledon of the peanut, 18µm, 5µm, 20µm for V²⁺ with 90keV implanted in sunflower, wheat, radish seeds, respectively. The penetration depth of implanted Cu²⁺ with 80 keV is about 90µm in the remainder funicle derivative of the mung bean seeds. The experimental result of the maximum penetration depth of implanted V⁺ in the peanut seeds was compared with the calculated value of the TRIM95.