The blistering and flaking behavior of many kinds of amorphous alloys under helium ion bombardment at room temperature was investigated. Helium ions with energies of 40 keV and 60keV were implanted within the fluence range (1.0~4.0)×10¹⁸ ions/cm². The surface topography of samples after irradiation was observed by using a scanning electron microscope. The diameter of blister and the thickness of exfoliated blister lids were measured. The results showed that many kinds of surface topography characteristics appeared for different fluences, energies and amorphous alloys, such as flaking, blistering, exfoliation, blister rupture, secondgeneration blistering and porous structure. The dependence of surface damage modes and the critical fluence for the onset of blistering and flaking on the sort of materials and ion energy was discussed.