Phase changes of the ZrO2-12 wt%Y2O3 film with Ar+ irradiation

Phase changes of the ZrO₂-12 wt%Y₂O₃ film with Ar⁺ irradiation

WANG Dezhi，

ZHANG Hailong，

YANG Bin，

HUANG Ningkang

Nuclear Science and Techniques

Vol.10, No.1

pp.31-34

Published in print 01 Feb 1999

21500

The zirconia containing 12wt%Y₂O₃ thin films deposited by r.f. magnetron sputtering at 25℃ or 400℃, and then bombarded with Ar⁺ beam at room temperature were characterized with XRD before and after Ar⁺ bombardment. It is found that a series of phases formation and transformation happened, among them the most important event is that T' phase appeared after Ar⁺ irradiation and the content of the T' phase increased with the increase of Ar⁺ ion doses from 5×10¹⁵ to 6×10¹⁶ ions cm^-2.

Magnetron sputteringZrO2-12wt% Y2O3 filmAr+ irradiationXRD

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