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A COMPLEX-TYPE FOCUSSED MAGNETRON FOR SPUTTERING

A COMPLEX-TYPE FOCUSSED MAGNETRON FOR SPUTTERING

Zheng Sixiao
Nuclear Science and TechniquesVol.5, No.2pp.116-118Published in print 01 May 1994
47300

The design of a small complex-type focussed magnetron with a long target-life used for excited multi-atoms beam film deposition in hard coatings is described. The magnetron tunnel of the magnetron source was constructed by a planar unbalanced magnetic annulus, which comes from the extended co-axial magnetron principle and inside cylindrical magnet tunnel. The use efficiency of inside circular cone sputtering target area is high up to 62%. The inside-inversion cone sputtering target has a long life and results in a higher deposition rate 35 nm/min for Ti at a 2.5 Pa Ar pressure. A better focussing direction of ejecting atom beam has been achieved, and the arc power input is 300W for Ti target.

Magnetron sputtering sourceFocussed atomic beamTarget lifeTi and pure graphite targets
REFERENCES
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