Nuclear Science and Techniques

MATERIALS CHARACTERIZATION USING THE MICROBEAM AT SUNY/ALBANY

H. Bakhru，

W.G. Morris，

A. Haberl

Vol.1, No.1-2

pp.70-75

Published in print 01 May 1990

4300

The State University of New York at Albany ion scanning microprobe has been used for materials characterization. Focused proton and helium ion beams have been used. Rutherford backscattering spectroscopy (RBS) and particle - induced X-ray emission (PIXE) analysis have been performed on microelectronic circuits with a spatial resolution of approximately 2 µ m. Studies on thin films of superconductors will be presented. Several examples of chemical and microstructural analysis will be given.

Ion scanning microprobeRutherford backscattering spectroscopyPIXEThin films of superconductors

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