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THE PEKING UNIVERSITY MULTI-APPLICATION ION BEAM ANALYSIS SYSTEM

THE PEKING UNIVERSITY MULTI-APPLICATION ION BEAM ANALYSIS SYSTEM

Shen Dingyu
Wang Xuemei
Nuclear Science and TechniquesVol.2, No.4pp.242-245Published in print 01 Nov 1991
22300

A multi-application ion beam analysis system and some research projects performed at this system are described. The lifetime of the RF ion source for He- is discussed.

TandemIon beam analysisRF ion source
REFERENCES
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[2] Yang Xihong et al., Vacuum, 39 (1989), 2-4: 191.
[3] Yang Xihong et al., Applied Surface Science, 38 (1989), 226.
[4] Gao Yuzhi et al., Chinese Journal of Semiconductors, 10 (1989), 537.