1 Introduction
MEMS (microelectromechanical systems) is a fabrication technology by which a microfabricated miniature electromechanical structure can be added to an integrated circuit (IC) [1]. These devices have both mechanical and electronic parts, with size ranging from a few micrometers to millimeters. Their functions include sensing, control, and execution at micro scale, and have the ability to impact macroscopic domains [2]. However, the conventional power supplies used with MEMS have disadvantages. For example, chemical batteries have low energy density and short lifetime, solar cells cannot work properly in conditions without steady illumination [3], and fuel cells or other devices using fossil fuels, must replenish the liquid fuel supply while eliminating byproducts formed inside the electronics [4]. Under these conditions, nuclear micro batteries, especially betavoltaic batteries, have become promising candidates to supply power to MEMS. A nuclear battery has very high energy density (the total energy content per unit mass): approximately 102 to 104 times higher than that of chemical or fossil fuels [5], while the power density is lower than that of conventional batteries. Based on semiconductor technology, some kinds of nuclear batteries can be miniaturized and integrated easily. Considering the long lifetimes of isotopes, and the spontaneity and stability of the decay process, such batteries can serve well under extreme conditions for many years. Generally, the domains of operation of a nuclear battery include long duration, no maintenance, low power, and high-energy power supply.
The first nuclear battery was made by Mosely in 1913, which directly used the charges of beta particles (electrons) to derive a current [6]. Subsequently, the first study of a betavoltaic battery was conducted in 1951, by Ehrenberg [7]. This was followed by the first betavoltaic battery (fabricated by Rappaport in 1953) using 90Sr/90Y with a semiconductor junction. The efficiency obtained was 0.4% [8]. Since the 1960s, several experiments involving betavoltaic batteries have been carried out, some of which were used in pacemakers [9][10]. However, considering the high cost and the toxicity of the contaminating isotope 146Pm, the nuclear batteries used in pacemakers were replaced with safer lithium-ion batteries [11]. In the 1990s, due to the continuous development of MEMS, betavoltaic batteries eventually became a major alternative among micro power sources. Various radioisotopes, semiconductors, and energy converting structures have been simulated and tested to gain additional output power. The candidate isotopes include 147Pm [9], 35S [12], 3H [13], 63Ni [3][14], 90Sr [11], and 14C [15]. The two main energy converting structures are PN junctions and Schottky devices. With a planar conversion structure, a large portion of the energy is wasted because of the angular distribution of emitted particles. Therefore, a nonplanar structure is utilized to increase the contact area between the source and the energy converting portion. This has enabled the used of additional energy [16]. More recently, betavoltaic batteries with nanostructures have also been proposed. One of thse batteries uses one-dimensional ZnO nanowires, and by applying a sandwich structure, the betavoltaic device achieved excellent electrical performance. With a source radiating 10 mCi 63Ni/Ni, the open-circuit voltage, short-circuit current, and effective energy conversion efficiency was 2.74 V, 18.4 nA, and 27.92%, respectively [17].
The development of the semiconductor industry has also played an important role in promoting betavoltaic battery research. In the 1950s, although Si was the first candidate energy converting material because of its technical maturity, its conversion efficiency was relatively low and it was vulnerable to radiation damage (the radiation threshold is ~200–250 keV; see [18]). Since then, a variety of semiconductors have been extensively researched. One of the main research achievements is the determination that the limit of conversion efficiency is a function of the bandgap [19]; specifically, that a betavoltaic battery using wide-bandgap semiconductors has higher conversion efficiency. Meanwhile, the open-circuit voltage and short-circuit current have also become higher, and new conductors are more radiation tolerant [20]. Consequently, third-generation semiconductors have become the focus of more recent research. SiC [3] [20][21][22] and GaN [23][24], in particular, are the most popular objects of research utilizing both Monte Carlo simulation and experimental methods. However, the growth of both materials is expensive and occurs at high temperature; therefore, a lower-cost semiconductor is preferred. Until now, there have been many studies about PN junction or Schottky diode-based betavoltaic batteries individually, but studies comparing electrical properties using these two structures on the same semiconductor are very few. Tarelkin et al. compared different metals in a Schottky barrier betavoltaic battery [25] and Rahmani compared Si-based PN junctions and Ni/Si Schottky barriers [26]. The performance of Schottky diodes is determined by the properties of the metal and the semiconductor; therefore, to obtain an extensive view of the comparison, the Schottky contact should be formed using the same semiconductor with different metals. Thereafter, different Schottky diodes and PN junctions can be comparable. Unfortunately, such an extended comparison is still lacking. For an advanced material, the doping method may not be mature enough, but this comparison is necessary to determine the potential performance of different devices and to find the best possible technology for fabricating betavoltaic batteries. Moreover, although it is well known that radioisotopes decay incessantly, the influence of time on the performance of betavoltaic batteries has not been explored. In fact, the decay process impacts the electrical performance profoundly, especially for isotopes with gaseous products (i.e., 3H), cascade decays (i.e., 90Sr-90Y), obvious density changes (i.e., 147Pm), or short lifetimes (i.e., 35S). In this paper, a cost-effective third-generation (i.e., wide bandgap) semiconductor (ZnO) was utilized as the energy converting material of a betavoltaic battery. PN junctions and Schottky diodes with different metals were also used as energy converting structures, and 63Ni was selected as the beta source. To utilize fully the energy produced, the doping concentrations were modulated to match the depletion width and energy deposition range. According to the decay formula of 63Ni, we analyzed the factors that influence the self-absorption effect and energy deposition. Using the Monte Carlo method, the time-related self-absorption process of the source and energy depositions were explored. Finally, the time-related electrical properties for all the devices designed in this work were obtained and compared.
2 Research Status on the Properties and Fabrication of ZnO Devices
ZnO is a material with great potential for use in the semiconductor industry. It is a direct bandgap semiconductor with a wide gap (3.37 eV) and is among the third-generation semiconductors (with SiC and GaN). Because of its excellent properties, it has been applied as a piezoelectric material, in varistors, transmittance conductive oxide film, fluorescent material, and in many other applications [27]. The direct and wide band gap enables optoelectronic applications in the blue/UV region, and for excitonic-effects-based optical devices, its high exciton binding energy makes it a favorable candidate. In comparison with GaN, the growth of ZnO is much easier. The large and high-quality ZnO bulk substrate is commercially available [28]. Moreover, by applying the homoepitaxial growth method, ZnO can be grown on native substrates, which can reduce the defect concentration and enhance film quality. In contrast, for GaN there are no native substrates. This means that a ZnO-based device of high quality could surpass the efficiencies obtained using GaN-based devices. Moreover, ZnO can be grown at much lower temperature, and the wet chemical etching method is available for it, which mean that the processing, design, and integration of electronic and optoelectronic devices would be more flexible [29]. For a betavoltaic battery, the conversion structure must work for a long time in radiation, therefore the radiation resistance of a material is of great importance. In fact, radiation damage is one of the major factors leading to degradation of betavoltaic batteries [30][31], but the extraordinary radiation hardness of ZnO can meet this challenge easily. Under bombardment from high-energy electron flux, no permanent defects are formed in the ZnO lattice [27], which result surpasses those with other common semiconductor materials, including Si, GaAs, CdS, and GaN. This indicates that ZnO devices would be very suitable for space applications [27] [29]. In addition, ZnO is inexpensive, nontoxic, has high breakdown strength, and good chemical stability, which make it a favorable semiconductor for use in radiation tolerant electronics [28].
Two electronic devices important for betavoltaic batteries are PN junctions and Schottky diodes, of which the former has been thoroughly researched. The devices used as the energy converting structure of a nuclear battery should have high performance and long-term stability because they would operate for a long time in radiation. Often, wide bandgap semiconductors suffer from doping asymmetry problems, which means that a semiconductor can be doped to achieve one type easily, but to obtain a contrary type is rather difficult. ZnO can easily be doped to achieve n-type, but creation of p-type ZnO has remained a challenge for years. In spite of many difficulties, researchers have succeeded in using various dopants and different growth techniques to grow p-type ZnO and even a ZnO homojunction. All these achievements now make it possible to fabricate ZnO-based betavoltaic batteries [32]. Moreover, the fabrication of ZnO homojunction diodes has also evolved in positive ways, adding to the potential for fabricating ZnO-based nuclear batteries. At present, well-maintained p-type ZnO films show no obvious degradation after a year [33]. By adding ZnMgO asymmetric double barriers, the homojunction performance can be enhanced substantially [34][35]. A series of novel and simpler fabrication methods have also been reported recently. By employing a surface pulsed laser irradiation method, p- and n-type ZnO can be fabricated with only one dopant in a single layer of NZO film [36]. A simple and controllable method at low temperature and in aqueous solution was also put forward, to create an Sb-doped ZnO (SZO)/ZnO film-based homojunction [37]. The wet chemistry method has also been utilized to fabricate ZnO homojunctions that show high rectification ratios [38].
In the mid-1960s, the study of ZnO-Schottky contacts was initiated. In comparison with ZnO homojunctions, the research on understanding and control of Schottky contacts on ZnO are relatively mature, especially for n-type ZnO. Experimental results show that Au, Ir, Pt, Pd, and Ag are the main metals used to provide Schottky contact on n-type ZnO, and the Schottky barrier height and ideality factor varies with different chemical treatments on a surface. The Schottky barrier height and ideality factor are usually within the range 0.4–1.2 eV and 1.0–3.57, respectively. Ideally, to get clean ZnO-metal contacts, the surfaces should be prepared under clean conditions. However, for a long time, several studies had not considered this; hence, the reported barrier heights were inconsistent. Even now, there is still no predictable method [39]. For p-type ZnO, Pd is suitable to form a Schottky contact [40], but generally, this research is still in its infancy. In short, ZnO has definite potential as a commendable energy converting material for use in betavoltaic batteries.
3 Principles for the Use of Schottky Devices and PN Junctions in Betavoltaic Batteries
Schematic diagrams of PN junction and Schottky device-based betavoltaic batteries are shown in Fig. 1. PN junctions play an extremely important role in electronic and optical applications. By joining together n- and p-type semiconductors, a PN junction is formed at the interface. Because of the existence of a concentration gradient, electrons diffuse into the p-region and holes diffuse into the n-region. An electric field that counteracts the diffusion can be created and this electric field can also sweep away mobile charges and obtain a space-charge region [41]. The movable charge carriers can hardly exist in this region; hence, this region is referred to as the depletion region. In fabricating semiconductor devices, there are metallization techniques by which to form Schottky and Ohmic contacts. A Schottky contact is formed using a metal and a semiconductor, and has a rectifying function similar to that of a PN junction [42]. By selecting the proper metals and doping concentration, a potential energy barrier between metal and semiconductor can be formed, analogous to that of a PN junction.
-202002/1001-8042-31-02-006/alternativeImage/1001-8042-31-02-006-F001.jpg)
When beta particles are emitted into a semiconductor, their energy will produce electron-hole pairs by ionization or transform the energy to heat. Electron-hole pairs can be produced either inside or outside the depletion region. In the depletion region, there is an electrical field that can separate electron-hole pairs, after which the charge carriers will be driven to produce current. However, outside the depletion region, there are no electrical fields to separate the electron-hole pairs, and instead, most of the charge carriers will recombine or become trapped by defects. Some charge carriers can drift into the depletion region, where they become part of the cell current [43].
4 Choice of Isotope and Corresponding Time-Related Behavior
Usually pure beta emitters are utilized for betavoltaic batteries, because beta particles are easier to shield than is gamma radiation; thus, the most common isotopes considered are 3H, 35S, 63Ni, 147Pm, and 90Sr. Among these isotopes, gaseous 3H is inconvenient to store and load, and its energy is relatively low (average β energy 5.682 keV). The 147Pm source has relatively short half-life (approximately 2.62 a), which is unsuited to long-term, no-refill situations. Moreover, the 147Pm used in betavoltaic batteries usually contains the impurity 146Pm, which is toxic and emits energetic gamma rays (0.75 MeV). The half-life of 35S is only 87.37 d, even shorter than that of 147Pm. The strontium isotope (90Sr) and its product 90Y emit high-energy beta particles (average β energy: 195.8 keV for 90Sr and 933.7 keV for 90Y). However, to utilize fully the energy released, the device would have to be large and would undergo serious radiation damage. For these reasons, 63Ni is preferred for its solid state, moderate energy (average β energy 17.425 keV), and relatively long half-life (101.2 a). However, for an actual solid-state source, the beta particles can be absorbed by the source itself (the self-absorption effect), which is inevitable. This effect may cause a rise in temperature, energy waste, and performance degradation. Moreover, the source decays continuously, which results in decrease of the radioactivity and changes the components in the source. Consequently, the regular pattern of the self-absorption effect is also changed. By choosing the proper level of radioactivity, the self-absorption effect can be reduced. In this work, the impact of time on the self-absorption effect was also taken into consideration.
The MCNP5 code was utilized in this work, and the number of particles in all the simulating processes was 107. In this simulation, a 1×1 cm rectangular source with changeable height was used as the energy depositing model, and the self-absorption rate
where
-202002/1001-8042-31-02-006/alternativeImage/1001-8042-31-02-006-F002.jpg)
The decay formula of 63Ni is
5 Choice of Metals for Schottky and Ohmic Contacts
For this work, n-type ZnO was selected to obtain the theoretical electrical behavior of Schottky devices because the fabrication of n-type ZnO is easier, and there are more studies about Schottky barriers on n-type ZnO. The influence of the surface state is neglected in the simulation. Theoretically, when a metal is brought into intimate contact with a semiconductor, whether it is an Ohmic or Schottky contact is defined by the work function of the metal and electron affinity of the semiconductor [39]. This can be expressed by the Schottky-Mott rule [44]:
This form is only available for Schottky barriers formed on n-type semiconductors, where
Metal | Al | Ag | Ti | Au | Pd | Ni | Pt |
---|---|---|---|---|---|---|---|
Density/g·cm-3 | 2.7 | 10.5 | 4.51 | 19.32 | 12.02 | 8.9 | 21.45 |
φm (eV) | 4.28 | 4.26 | 4.33 | 5.1 | 5.12 | 5.15 | 5.64 |
φB (eV) | 0.18 | 0.16 | 0.23 | 1.0 | 1.02 | 1.05 | 1.54 |
Table 1 can also be used to select metals to produce electrodes. Another metal-semiconductor contact, namely the Ohmic contact (which has relatively low contact resistance to the semiconductor bulk or series resistance), is appropriative for fabricating electrodes. In an actual Ohmic contact with gratifying performance, there should not be obvious performance degradation of devices, and the voltage drop should be negligible in relation to the drop across the device’s active region. An ideal Ohmic contact is formed when the barrier is zero, and in this condition the carriers are free to flow in or out of the semiconductor to ensure that the contact has minimum resistance [39]. For an n-type ZnO, the work function of the selected metal should be close to or smaller than the electron affinity of ZnO. It can be seen that Al, Ag, and Ti have relatively low work functions, indicating that they are adequate for this kind of contact. To form an Ohmic contact on ZnO with low contact resistivity, increase of the ZnO surface doping concentration is beneficial, along with reducing the Schottky barrier height. By applying these two methods, the barrier width becomes very thin, and the carriers are able to tunnel through.
6 Energy Deposition
The simulation model is presented in Fig. 3. ZnO bulk (1×1×0.5 cm3) was utilized for energy deposition. In this model, a layer of 200 nm is presented that refers to the dead layer (in which the deposited energy cannot be utilized). This includes the p-type region for the PN junction and metal layer for the Schottky diodes. The source was set on the bottom surface of the dead layer, and all particles were vertically incident. The energy deposition at initiation (time zero) in the dead layer and effective area (from the upper surface of the metal layer/p-type ZnO layer to the area of stratification) are presented in Fig. 4a. For all kinds of devices, more than 99% of the energy was deposited 6 μm from the upper surface of the source to the stratification area; therefore, the effective area was set. To utilize fully the energy produced, the width of the depletion layer was set at the same thickness as the effective area, which was 5.8 μm. Within the dead layer, the energy deposition remained almost unchanged throughout the simulations. Fig. 4b shows the change of time-related energy deposition, which has a slight downward trend in both the effective area and the dead layer.
-202002/1001-8042-31-02-006/alternativeImage/1001-8042-31-02-006-F003.jpg)
-202002/1001-8042-31-02-006/alternativeImage/1001-8042-31-02-006-F004.jpg)
The energy deposition comparisons of Schottky diodes and PN junctions are also shown in Fig. 4. In the dead layer, energy deposition takes the order EPt > EAu > EPd > ENi > EZnO, while in the effective area, the situation is completely opposite. Clearly, from the energy deposition point of view, Ni is the most suitable metal for a Schottky diode among these four metals because it has relatively lower density (shown in Table 1). This leads to less energy deposited in the metal itself and more in the effective area. Moreover, a ZnO homojunction has the most energy deposition in the effective area among all these devices because ZnO has the lowest density (5.6 g/cm3).
7 Analyses of Built-in Potential and Depletion Width in Schottky Diodes and PN Junctions
In a betavoltaic battery, electron-hole pairs are separated by the potential built into the depletion region. To exploit the beta source energy, the depletion width and the energy deposition range should be well matched. The depletion width can be changed by adjusting the doping concentrations. For Schottky diodes, the built-in potential is given by the following relation [20]:
where Vt is the thermal voltage, and Vt = 0.0259 V at ambient temperature. Here,
At zero bias, the depletion width is given by [20]:
where
In equilibrium condition, the built-in potential for PN junctions is given by the following relation [45]:
Here,
The depletion width of a PN junction can be calculated using [45]:
Theoretically, the intrinsic carrier concentration can be expressed by:
The term Eg is the band gap of ZnO, and
In this work, the depletion width was 5.8 μm. For Schottky diodes, the relationships of Vbi and W versus ND are shown in Fig. 5a. With increase in the doping concentration, the built-in potential increases slightly while the depletion width decreases substantially. For the PN junctions, ND was set at 1016 cm-3, and the relationships of Vbi and W versus NA are shown in Fig. 5b. These resemble the regular pattern of a Schottky diode. The selected doping concentrations and built-in potentials are listed in Table 2.
-202002/1001-8042-31-02-006/alternativeImage/1001-8042-31-02-006-F005.jpg)
PN junction | Pt/ZnO | Au/ZnO | Ni/ZnO | Pd/ZnO | |
---|---|---|---|---|---|
Doping concentrations (×1013 cm-3) | ND=103 | ND= 3.57447 | ND= 1.9765 | ND=2.1258 | ND=1.8978 |
NA= 8.44 | |||||
Built-in potential (V) | 2.90913 | 1.24224 | 0.68690 | 0.73878 | 0.70585 |
8 Electrical Performance Simulations
In the following calculations, it was assumed that the electron-hole pairs in the depletion region are completely collected, and that outside this region, none of them are collected. With these assumptions, the short-circuit current can be expressed by the following equation [45]:
where CE(n) is the collection rate of electron-hole pairs in layer n of the sample, E(n) is the deposition energy in layer n, A is the absolute radioactivity, q is the electron charge, and Ee-h is the average ionization threshold. In Section 6, we obtained the energy deposition in the depletion region, E(n), and according to the condition above, the relevant CE(n) was 1.
In our previous work, we used an empirical equation to estimate Ee-h because the universally acknowledged value was not presented [47]:
where Eg is the band gap and Ee-h as achieved was 9.9 eV.
To evaluate device quality, reverse saturation current is often utilized. If a device has low reverse saturation, it has fine quality. For Schottky diodes, the density of a reverse saturation current (A/cm2) can be expressed by [20]:
where A* is the effective Richardson’s constant. For ZnO, the universally acknowledged value is
where k0 indicates the Boltzmann constant.
The open-circuit voltage can be obtained by the following formula:
where
One of the key parameters that evaluates the performance of a betavoltaic battery is the fill factor (FF). A battery with higher fill factor has output power that comes closer to its theoretical maximum, thus its efficiency is higher. The definition of the fill factor is the ratio of the maximum output power (Pm) to the product of the relative open-circuit voltage (Voc) and the short-circuit current (Isc):
To evaluate the fill factor, an empirical equation can be utilized [47]:
where voc = Voc / (k0T/q).
The definition of maximum output power is as follows [47]:
In this work, we used the device converting efficiency to evaluate the total performance of the betavoltaic battery, which can be defined as below [48]:
where Psource is the surface power of the source.
9 Results and Discussion
According to Eqs. (10) and (11), the short-circuit current densities are constants without time-related changes, in theory. The short-circuit current density for a ZnO-based PN junction and for Pt, Au, Pd, and Ni/ZnO Schottky diodes is 4.65055×10-52, 4.32989×10-20, 4.91208×10-11, 2.26936×10-11, and 7.12622×10-12 A/cm2, respectively. These current densities indicate that the PN junction has the best quality among all these devices, while the Pt/ZnO Schottky device has the best quality among the Schottky devices.
Time-related electrical properties of the PN junction and of Schottky diodes are presented in Fig. 6(a)-(e). At the start (time zero), the ZnO-based PN junction has the highest open-circuit voltage, short-circuit current, fill factor, maximum output power, and conversion efficiency (up to 2.64452 V, 0.10259 μA, 94.5366%, 0.25647 μW, and 7.584%, respectively). These are much higher than with other Schottky devices. The reason is that the PN junction has very low reverse saturation current density, which leads to relatively higher Voc according to Eq. (12). Meanwhile, the density of ZnO is lower than all the Schottky metals mentioned above, leading to more energy deposition in the effective area. Among these Schottky diodes, the Pt/ZnO device has the highest Voc, Pm, FF, and η due to its highest
-202002/1001-8042-31-02-006/alternativeImage/1001-8042-31-02-006-F006.jpg)
All the electrical properties (in a battery) decline as time goes by. The declines of Isc and Pm follow the exponential law, while the declines of Voc, FF, and η show approximately linear patterns. Among all the electrical properties, the decline of Pm is the most evident. Hence, Pm was selected to evaluate the validity of the battery concept. Taking the ZnO-based PN junction as an example, in 200 years the decline rates of Voc, Isc, Pm, FF, and η would be 1.365, 75.189, 0.065, 75.544, and 0.748%, respectively. While for Pt, Au, Pd, and Ni/ZnO Schottky diodes, the decline of Pm becomes more evident (76.523, 81.589, 80.636, and 79.862%, respectively). Thus, from the viewpoint of long-term service, Pt/ZnO and Ni/ZnO Schottky devices are more suitable than PN junctions, whereas Au/ZnO and Pd/ZnO Schottky devices are less adaptable. A Pt/ZnO Schottky diode could be utilized in devices that need high Voc and Pm, and a Ni/ZnO Schottky diode would be more suitable for devices needing higher electric current.
In short, irrespective of whether the time factor is considered or not, PN junctions have the highest Voc, Isc, Pm, FF, and η (that is, the best electrical performance) among all the competitors discussed here. Regardless of long-term radiation damage, PN junction-based devices also have the longest active period. Nevertheless, Schottky diodes have their own advantages. The fabrication of Schottky diodes requires only one type of extrinsic semiconductor, which is very convenient for semiconductors with asymmetry doping problems (i.e., for GaN and ZnO obtaining n-type semiconductors is easier, while for diamond it is easier to get p-type ones). Compared with PN junction-based devices, Schottky diodes offer additional choices of state-of-the-art semiconductors, and the manufacturing processes are simpler. When fabricating Schottky diode-based betavoltaic batteries, the radiation source is in contact with the metal layer of the Schottky diode, which makes it less susceptible to radiation damage. In contrast, with a PN junction, the semiconductor lattice is prone to displacement due to radiation damage, because the radiation source is in direct contact with the semiconductor. All of these advantages indicate that Schottky diodes are a good alternative to PN junction-based betavoltaic batteries.
10 Conclusion
In summary, Schottky contacts using different metals for n-type ZnO and ZnO-based PN junctions were utilized as energy converting structures for betavoltaic batteries, with 0.101121 Ci 63Ni as the selected beta source. Based on Monte Carlo simulations, the time-related self-absorption rate and electrical properties of a number of devices were obtained and compared. For a 63Ni source, the self-absorption rate showed a slightly upward trend as time went by. The optimal doping concentration for Schottky diodes was ND = 1.9765–3.57447×1013 cm-3, and for PN junctions it was NA = 8.44×1013 cm-3 while ND = 1016 cm-3. Generally, the electrical performance of PN junctions is better than that of Schottky diodes. Among all the kinds of Schottky diodes discussed here, Pt/ZnO has the highest maximum output power, and Ni/ZnO has the greatest short-circuit current. Taking long-term service into consideration, Pt/ZnO and Ni/ZnO are the most suitable among the Schottky diodes. A Pt/ZnO Schottky diode could be utilized in devices needing high open-circuit voltage and maximum output power, while a Ni/ZnO Schottky diode would be more suitable for devices needing greater electrical current. Although its electrical performance is relatively inferior, the ZnO based Schottky diode has its own advantages, including easier fabrication, independence of p-type ZnO, and more resistance to radiation damage. Therefore, they still are considered viable alternatives to PN junctions as the energy converting structures of betavoltaic batteries.
Fabrication of diamond microstructures for microelectromechanical systems (MEMS) by a surface micromachining process
, Thin Solid Films. 340, 1-6(1999). https://doi.org/10.1016/S0040-6090(98)01370-4.63Ni schottky barrier nuclear battery of 4H-SiC
, J. Radioanal. Nucl. Chem. 287, 173-176(2011). https://doi.org/10.1007/s10967-010-0746-7.Principles of Betavoltaic Battery Design
, J. Energy Power Sources. 3,11-41 (2016).Atomic batteries: Energy from radioactivity
, J. Nucl. Energy Sci. Power Gener. Technol. 05 1-8 (2015). https://doi.org/10.4172/2325-9809.1000144.Radioactive and photoelectric p-n junction power sources
, J. Appl. Phys. 25, 1422-1434 (1954). https://doi.org/10.1063/1.1721579.The electron voltaic effect
, Proc. Phys. Soc. Sect. A. 64, 424-424 (1951). https://doi.org/10.1088/0370-1298/64/4/109.The Electron-Voltaic Effect in p − n Junctions Induced by Beta-Particle Bombardment
, Phys. Rev. 93, 246-247 (1954). https://doi.org/10.1103/PhysRev.93.246.2.Clinical Experience with Nuclear-Powered Pacemakers (Promethium-147)
, Engineering in Medicine (Initial U. S. Experience with Promethium-147 Fueled Cardiac Pacemakers
, in: Engineering in Medicine (Development of nuclear microbattery prototype based on Schottky barrier diamond diodes
, Phys. Status Solidi Appl. Mater. Sci. 212, 2539-2547 (2015). https://doi.org/10.1002/pssa.201532214.A methodology for efficiency optimization of betavoltaic cell design using an isotropic planar source having an energy dependent beta particle distribution
, Appl. Radiat. Isot. 127, 41-46 (2017). https://doi.org/10.1016/j.apradiso.2017.05.005.Development of tritiated nitroxide for nuclear battery
, Appl. Radiat. Isot. 125, 66-73 (2017). https://doi.org/10.1016/j.apradiso.2017.04.013.Vacuum degree effects on betavoltaics irradiated by 63Ni with differently apparent activity densities
, Sci. China Technol. Sci. 60, 282-288 (2017). https://doi.org/10.1007/s11431-016-0505-x.C-14 beta converter
, Phys. Part. Nucl. 48, 941-944 (2017). https://doi.org/10.1134/S106377961706020X.Betavoltaic microbatteries using porous silicon
.A betavoltaic microbattery using zinc oxide nanowires under build in potential difference
.Optimization design and analysis of Si-63Ni betavoltaic battery
, Sci. China Technol. Sci. 55, 990-996 (2012). https://doi.org/10.1007/s11431-012-4752-6.Review of Betavoltaic Energy Conversion
.A micro nuclear battery based on SiC schottky barrier diode
, J. Microelectromechanical Syst. 20, 685-690 (2011). https://doi.org/10.1109/JMEMS.2011.2127448.Study of the characteristics of an irradiated 4H-SiC charge particle detector
. Nucl. Tech. 42 (5): 050501 (2019) (in Chinese) https://doi.org/10.11889/j.0253-3219.2019.hjs.42.050501Research and application of silicon carbide diode in high voltage power supply
. Nucl. Tech. 42 (5): 050402 (2019) (in Chinese) https://doi.org/10.11889/j.0253-3219.2019.hjs.42.050402Modeling, design, fabrication and experimentation of a GaN-based, 63Ni betavoltaic battery
. J. Phys. D. Appl. Phys. 51, 035101 (2018). https://doi.org/10.1088/1361-6463/aa9e41.The design optimization for GaN-based betavoltaic microbattery
.Comparative study of different metals for Schottky barrier diamond betavoltaic power converter by EBIC technique
, Phys. Status Solidi Appl. Mater. Sci. 213, 2492-2497 (2016). https://doi.org/10.1002/pssa.201533060.Optimization of silicon parameters as a betavoltaic battery: Comparison of Si p-n and Ni/Si Schottky barrier
, Radiat. Phys. Chem. 125, 205-212 (2016). https://doi.org/10.1016/j.radphyschem.2016.04.012.Production and annealing of electron irradiation damage in ZnO
, Appl. Phys. Lett. 75, 811-813(1999). https://doi.org/10.1063/1.124521.Fundamentals of zinc oxide as a semiconductor, Reports Prog
. Phys. 72, 126501 (2009). https://doi.org/10.1088/0034-4885/72/12/126501.The radiation damage of crystalline silicon PN diode in tritium beta-voltaic battery
, Appl. Radiat. Isot. 90, 165-169 (2014). https://doi.org/10.1016/j.apradiso.2014.03.027.Production of 35S for a liquid semiconductor betavoltaic
, J. Radioanal. Nucl. Chem. 282, 271-274 (2009). https://doi.org/10.1007/s10967-009-0157-9.Doping asymmetry problem in ZnO: Current status and outlook
, Proc. IEEE. 98, 1269-1280 (2010). https://doi.org/10.1109/JPROC.2010.2043330Low-resistivity, stable p-type ZnO thin films realized using a Li-N dual-acceptor doping method
, Appl. Phys. Lett. 88, 222114 (2006). https://doi.org/10.1063/1.2209191.High mobility ultrathin ZnO p-n homojunction modulated by Zn0.85Mg0.15O quantum barriers
, Chinese Phys. B. 27, 1-5 (2018). https://doi.org/10.1088/1674-1056/27/3/037804.The ZnO p-n homojunctions modulated by ZnMgO barriers
, AIP Adv. 5, 047104 (2015). https://doi.org/10.1063/1.4917178.Fabrication of p-ZnO:Na/n-ZnO:Na homojunction by surface pulsed laser irradiation
, RSC Adv. 7, 37296-37301(2017). https://doi.org/10.1039/c7ra05574a.A facile and reproducible synthesis of non-polar ZnO homojunction with enlarged rectification rate and colorful light emission
, J. Alloys Compd. 793, 295-301(2019). https://doi.org/10.1016/j.jallcom.2019.04.109.Electrical and optical properties of rectifying ZnO homojunctions fabricated by wet chemistry methods
, Phys. Status Solidi Appl. Mater. Sci. 215, 1-6 (2018). https://doi.org/10.1002/pssa.201700592.ZnO Schottky barriers and Ohmic contacts
, J. Appl. Phys. 109, 121301 (2011). https://doi.org/10.1063/1.3581173.Analysis of structural, optical and electrical properties of metal/p-ZnO-based Schottky diode
, J. Semicond. 38, 104002 (2017). https://doi.org/10.1088/1674-4926/38/10/104002.Investigation on a radiation tolerant betavoltaic battery based on Schottky barrier diode
, Appl. Radiat. Isot. 70, 438-441(2012). https://doi.org/10.1016/j.apradiso.2011.10.013.A review of nuclear batteries
, Prog. Nucl. Energy. 75, 117-148 (2014). https://doi.org/10.1016/j.pnucene.2014.04.007.Latest progress of schottky contacts fabricated on ZnO substrates
. Chinese J. Vac. Sci. Technol. 28,126-132 (2007). (in Chinese)Optimization design of GaN betavoltaic microbattery
, Sci. China Technol. Sci. 55, 659-664(2012). https://doi.org/10.1007/s11431-011-4739-8.Mean barrier height and richardson constant for Pd/ZnO Thin film-based Schottky Diodes grown on n-Si substrates by thermal evaporation method
, IEEE Electron Device Lett. 34, 1238-1240(2013). https://doi.org/10.1109/LED.2013.2278738.Influences of planar source thickness on betavoltaics with different semiconductors
, J. Radioanal. Nucl. Chem. 304, 517-525 (2015). https://doi.org/10.1007/s10967-014-3879-2.Theoretical prediction of diamond betavoltaic batteries performance using 63Ni
, Chinese Phys. Lett. 35, 5-9(2018). https://doi.org/10.1088/0256-307X/35/7/072301.