Angular distribution of sputtered atoms induced by low-energy heavy ion bombardment

NUCLEAR, HEAVY ION AND ATOMIC PHYSICS

Angular distribution of sputtered atoms induced by low-energy heavy ion bombardment

ZHANG Lai，

ZHANG Zhu-Lin

Nuclear Science and Techniques

Vol.15, No.6

pp.340-343

Published in print 01 Dec 2004

CLC：O562.5

25200

The sputtering yield angular distributions have been calculated based on the ion energy dependence of total sputtering yields for Ni and Mo targets bombarded by low-energy Hg⁺ ion. The calculated curves show excellent agreement with the corresponding Wehner's experimental results of sputtering yield angular distribution. The fact clearly demonstrated the intrinsic relation between the ion energy dependence of total sputtering yields and the sputtering yield angular distribution. This intrinsic relation had been ignored in Yamamura's papers (1981,1982) due to some obvious mistakes.

Total sputtering yieldSputtering yield angular distributionAnisotropic effect

References

[1]

Andersen H H, Bay H L. in: Sputtering by particle bombardment I. Behrisch R. (ed) Beilin: Springer, 1981. 193-206

[2]

Bhattacharjee S, Zhang J, Shutthandan V et al. Nucl Instr Meth, 1997, B129: 123-129

[3]

Yamamura Y, Tawara H. Atomic Data and Nuclear Tables, 1996, 92 (2): 149-253; and

Yamamura Y, Tawara H. Erratum in Atomic Data and Nuclear Tables, 1996, 63 (2): 353

[4]

Eckstein W, Garcia-Rosales C, Roth J et al.

Technical report, Max-Planck Institute für Plasmaphysik, Garching, Germany, 1993: IPP 9/82

Baidu Scholar

Google Scholar

[5]

Yamamura Y. Nucl Instr Meth, 1982, 194: 515-522

[6]

Yamamura Y. Rad Eff, 1981, 55: 49-55

[7]

Ziegler J F, Biersack J P, Littmark U. The stopping and range of ions in solid. Vol.1, New York: Pergamon, 1985: 53

[8]

Matsunami N, Yamamura Y, Itikawa Y et al. Atomic Data and Nuclear Tables, 1984, 31: 1-80

[9]

Wehner G K, Rosenberg D. J Appl Phys, 1960, 31: 177