ION IMPLANTATION OF DIAMOND-LIKE CARBON FILMS

Xiang Jinzhong，

Zheng Zhihao，

Liao Changgeng，

Xiong Jing，

Wang Yongqiang，

Zhang Fangqing

Nuclear Science and Techniques

Vol.3, No.1

pp.25-29

Published in print 01 Feb 1992

25200

Diamond-like carbon (DLC) films (a-C:H) were implanted by 140 keV and 110 keV Ar ion beams. The resistivities of the implanted films decreased dramatically under a dose of 2×10¹⁶ Ar/cm². IR spectra and optical gap Eopt were measured. It was found that the sp² and sp³ components decreased due to the loss of hydrogen during implantation, and the ratio of components sp² bonds to sp³ bonds increased with the ion dose. And the optical gap E_opt decreased from 1.46 eV to 0.83 eV. The hydrogen (bonded and unbonded) contents in the films were measured with the nuclear resonant reaction ¹H(¹⁹F, χ γ)¹⁶O. It is shown that hydrogen plays an important role in affecting some properties of DLC fims.

Ion implantationDiamond-like film

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