Studies of preparing method of nano grain metal-insulator film Cu:CaF2

Studies of preparing method of nano grain metal-insulator film Cu:CaF₂

Zhao Zi-Qiang，

Wei Lun-Cun，

Wang Hao，

Zhong Yun-Cheng，

Lu Xi-Ting

Nuclear Science and Techniques

Vol.7, No.4

pp.240-242

Published in print 01 Nov 1996

29000

A machine to prepare nano grain metal-insulator films, for example Cu:CaF₂ film, by means of magnetron sputtering generating clusters and at the same time evaporating insulator medium, is introduced. This machine is suitable for almost all solid metal and semiconductor clusters. And with it, many kinds of function film series can be prepared. The size of cluster embedded in insulator is from 10 to 70 nm. The Cu cluster and medium CaF₂ are both polycrystalline structure.

Embedded clusterCrystalline structureNano grainsFilmMegnetron sputteringEvaporating

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